Research of the Atomic Force Microscope Scanning Head Based on the Qplus Technology
WANG Zhi-xin1,2,GAO Si-tian2,LI Dong-sheng1,Li Qi2,LI Shi2,LI Wei3,SHI Yu-shu2
1.College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China;
2. National Institute of Metrology, Beijing 100029, China
Abstract：The atomic force microscope (AFM) scanning head based on the qPlus technology is preliminarily designed and assembled. The silicon cantilever sensor is replaced by quartz tuning fork type force sensor. Preamplifier circuit is designed and frequency characteristic of this scanning head is also analyzed. Finally, the experimental device for this scanning head is set up to make performance test. The test results show that the scanning head has a high sensitivity in the mode of frequency modulation. Meanwhile, the analysis of frequency characteristic indicates that the weight of tip and the bonding portion is the main factor to influence the resonant frequency of this scanning head. This research provides experiences for the design and assembly of this type scanning head and also lays a foundation for further study.
王志新,高思田, 李东升, 李琪, 李适, 李伟, 施玉书. 基于Qplus技术的AFM测头研究[J]. 计量学报, 2016, 37(2): 113-117.
WANG Zhi-xin, GAO Si-tian, LI Dong-sheng,Li Qi, LI Shi, LI Wei, SHI Yu-shu. Research of the Atomic Force Microscope Scanning Head Based on the Qplus Technology. Acta Metrologica Sinica, 2016, 37(2): 113-117.
［1］Giessibl F J. Advances in atomic force microscopy［J］.Rev Mod Phys, 2003, 75: 949-983.
［2］Gross L, Mohn F, Moll N, et al. The chemical structure of a molecule resolved by atomic force microscopy ［J］.Science, 2009, 325: 1110-1114.
［3］Bienias M, 赵克功,高思田,等. 计量型原子力显微镜, 计量学报,1998: 19(1), 1-8.
［4］赵克功, Buechner H J. 无阿贝误差计量型原子力显微镜, 计量学报,2002: 23(2), 87-89.
［5］高思田. 计量型原子力显微镜的研究［D］.天津大学,2007.
［6］黄强先,王毛翠,赵剑,等. 石英音叉扫描探针显微镜［J］. 机械工程学报,2012,48(4):1-5.
［7］陈鹏程,仉君,袁秉凯,等. 基于qPlus技术的扫描探针显微学研究进展［J］. 科学通报,2013,58(24):2360-2366.
［8］Yang C H, Chang T H, Yang M J, et al. A low noise transimpedance amplifier for cryogenically cooled quartz tuning fork force sensors ［J］. Review of Scientific Instruments, 2002, 73 (7): 2713.
［9］Martin Y, Williams C C, Wickramasinghe H K. Atomic force microscope-force mapping and profiling on a sub 100- scale ［J］. Journal of Applied Physics, 1987,61: 4723-4729.
［10］Albrecht T R, Grutter P, Home D, Rugar D. Frequency modulation detection using high-Q cantilevers for enhanced force microscopy sensitivity［J］. Journal of Applied Physics, 1991, 69: 668-673.
2016, Vol. 37 
