SSI ļʱ
计量学报  2023, Vol. 44 Issue (9): 1347-1351    DOI: 10.3969/j.issn.1000-1158.2023.09.05
  电磁学计量 本期目录 | 过刊浏览 | 高级检索 |
基于磁控溅射的弱电加热结构的设计及测量研究
闫晓燕,梁时硕,刘雨奇,郭琦
中北大学,山西 太原 030051
Design and Measurement of Weak Current Heating Structure Based on Magnetron Sputtering
YAN Xiao-yan,LIANG Shi-shuo,LIU Yu-qi,GUO Qi
North University of China, Taiyuan, Shanxi 030051, China
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