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计量学报  2023, Vol. 44 Issue (9): 1347-1351    DOI: 10.3969/j.issn.1000-1158.2023.09.05
  电磁学计量 本期目录 | 过刊浏览 | 高级检索 |
基于磁控溅射的弱电加热结构的设计及测量研究
闫晓燕,梁时硕,刘雨奇,郭琦
中北大学,山西 太原 030051
Design and Measurement of Weak Current Heating Structure Based on Magnetron Sputtering
YAN Xiao-yan,LIANG Shi-shuo,LIU Yu-qi,GUO Qi
North University of China, Taiyuan, Shanxi 030051, China
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摘要 在高精度原子磁力仪中,原子气室的温度直接影响着碱金属电子自旋的极化率,从而影响磁力仪的灵敏度,因此精确地控制原子气室的温度是实现高精度原子磁力仪应用的关键。基于电加热和回折磁抵消原理,由毕奥-萨伐尔定律推导与简化模型仿真,设计完成了单层和双层结构的微型弱磁电加热结构。通过分别测量单、双层结构表面不同距离、不同电流条件下的磁通密度模,验证了回折单双层线圈结构对电流产生磁场的抑制作用。其中双层回折加热结构比回折结构的电加热剩磁抑制特性提高约6.9倍,在距电加热结构5mm处的磁场变化率仅为72.2nT/A,通过对比相同时间、相同工作电流的加热效应,可以发现双层具有更快的温度响应。研究表明双层回折设计可以实现原子气室弱剩磁高精度的加热方式,为原子极化提供一种简单、快速的电加热方案。
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闫晓燕
梁时硕
刘雨奇
郭琦
关键词 计量学弱磁检测原子气室毕奥-萨伐尔定律磁控溅射无磁电加热结构有限元仿真    
Abstract:In high-precision atomic magnetometer, because the temperature of the atomic gas chamber directly affects the polarization of the electron spin of alkali metal, and then affects the sensitivity of the magnetometer, precisely controlling the temperature of the atomic gas chamber is the key to realize the application of high-precision atomic magnetometer. Based on the principle of electric heating and the principle of back-folding magnetic cancellation,the micro weak magnetic electric heating chips with single-layer and double-layer structures are designed and completed through the derivation of Biot-Savart law and simplified model simulation. By measuring the magnetic flux density modes at different distances and different current conditions on the surface of single and double-layer chips,the suppression effect of the single and double-layer coil structure on the magnetic field generated by the current is verified. The double-layer heating chip is about 6.9 times higher than the electric heating remanence suppression characteristics of the folding chip.The magnetic field change rate at 5mm from the chip is only 72.2nT/A.By comparing the heating effect of the same working current at the same time,it can be found that the double-layer has a faster temperature response.
Key wordsmetrology    weak magnetic detection;atomic gas chamber    Biot-Savart law    magnetron sputtering    no magnetoelectric heating    finite element simulation
收稿日期: 2023-04-10      发布日期: 2023-09-21
PACS:  TB972  
基金资助:山西省回国留学人员科研资助(2021-116)
作者简介: 闫晓燕(1977-),山西吕梁人,中北大学副教授,主要从事电路与系统设计、仪器测试计量技术等方面的研究。Email:30875488@qq.com
引用本文:   
闫晓燕,梁时硕,刘雨奇,郭琦. 基于磁控溅射的弱电加热结构的设计及测量研究[J]. 计量学报, 2023, 44(9): 1347-1351.
YAN Xiao-yan,LIANG Shi-shuo,LIU Yu-qi,GUO Qi. Design and Measurement of Weak Current Heating Structure Based on Magnetron Sputtering. Acta Metrologica Sinica, 2023, 44(9): 1347-1351.
链接本文:  
http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2023.09.05     或     http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2023/V44/I9/1347
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