Investigation on Calibration Method of NTC Thermistor Thermometer Applied to Integrated Circuit Research on Calibration Method of NTC Thermistor Thermometer Used in Integrated Circuit
LI Jia-hao1,SUN Jian-ping1,LI Ting1,WANG Hong-jun1,WANG Guang-yao1,CHEN Ze-chuan2,GAO Chuan-ji2
1. National Institute of Metrology, Beijing 100029, China
2. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
摘要针对集成电路在21～23℃范围内近mK量级测温精度的需求,研究了负温度系数(negtive temperature coefficient,NTC)热敏电阻温度计的校准方法对集成电路测温系统精度的影响。利用比较法对24支3种不同型号的NTC热敏电阻温度计进行校准,使用最小二乘法进行基本方程、Hoge-1方程、Steinhart-Hart方程的系数计算,分析校准方程的内插残差,评价低阶精准校准方程的可行性,为集成电路制作工艺的高质量中的温度测控提供技术支撑。结果表明:基本方程、Steinhart-Hart方程、Hoge-1方程残差的标准偏差分别为2.29、0.63、0.65mK;使用2个校准点的基本方程的性能最差,使用3个校准点的校准方程的Hoge-1方程表现出最好的内插性能,在集成电路窄温区温度精确测量方面具有较高的应用价值。
Abstract：Aiming at the requirement of near mK temperature measurement accuracy of intgrated circuit (IC) in the range of 21～23℃, the influence of the calibration method of negtive temperature coefficient (NTC) thermistor thermometer on the temperature measurement accuracy of IC is studied. The coefficients of the Basic, Hoge-1, and Steinhart-Hart equations are calculated using the least-squares method, and the interpolation residuals of the calibration eqution are analyzed to evaluate the feasibility of the low-order accurate calibration equation for high-quality temperature measurement and control of IC fabrication processes. The results show that the standard deviations of the residuals of the Basic equation, Steinhart-Hart equation, and Hoge-1 equation are 2.29mK, 0.63mK, and 0.65mK, respectively; the Basic exponential eqution with two calibration points has the worst performance, and the Hoge-1 equation with three calibration points shows the best interpolation performance, which is valuable for accurate temperature measurement in narrow temperature regions of IC.
李嘉豪,孙建平,李婷,汪洪军,王光耀,陈泽川,高传吉. 集成电路用NTC热敏电阻温度计校准方法研究[J]. 计量学报, 2023, 44(8): 1208-1213.
LI Jia-hao,SUN Jian-ping,LI Ting,WANG Hong-jun,WANG Guang-yao,CHEN Ze-chuan,GAO Chuan-ji. Investigation on Calibration Method of NTC Thermistor Thermometer Applied to Integrated Circuit Research on Calibration Method of NTC Thermistor Thermometer Used in Integrated Circuit. Acta Metrologica Sinica, 2023, 44(8): 1208-1213.
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2023, Vol. 44 
