Abstract：In the on-wafer thin film temperature sensor, platinum is used as the temperature sensing film, and is manufactured by semiconductor technology, which can effectively monitor the temperature of semiconductor devices on-wafer. In order to calibrate this type of temperature sensor, according to its working principle and structural characteristics, referring to the requirements of JJG 229-2010 for calibration device, a method is presented to set up a calibration device which consists of high and low temperature probe station, 8 1/2 digital multimeter and direct current probe. The resistance values of the temperature sensor are measured at different temperatures, and a scale of resistance temperature characteristics is obtained. The on-wafer thin film platinum resistance temperature sensor is calibrated at two temperature points of 25 ℃ and 125 ℃. The verification of calibration data and calibration result shows that the proposed method is feasible and can effectively solve the calibration problem of on-wafer thin film platinum temperature sensor without connecting leads. This calibration technique also provides a reference for other types of on-wafer temperature sensors.
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2022, Vol. 43 
