Research on Resolution Evaluation Method of Nano-Positioning Stage Based on Laser Interference and Capacitive Sensor Composite Calibration Technology
YAN Han1,ZHANG Shu2,3,PI Lei2,MA Ying-han1,HU Jia-cheng1,SHI Yu-Shu2,3
1. Colloge of Metrology & Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China
2. National Institute of Metrology,Beijing 100029,China
3. Shenzhen Institute Technology Innovation,Shenzhen,Guangdong 518132,China
Abstract：When measuring nanometer resolution with laser interferometer, the interference measurement is limited due to environmental factors. Capacitive sensor can resist this kind of interference well, but it has the disadvantages of untraceable and nonlinear error.In order to realize the measurement traceability of nanoscale resolution and ensure the accuracy of the measurement value, we use laser interferometer to calibrate the capacitor sensor, so as to form a complete traceability chain of nanometer microtable-capacitance sensor-laser interferometer. The maximum deviation of the measured value between the capacitance sensor and the laser interferometer at 10nm step is 0.8nm, and the resolution of the nano stages is 2nm in the capacitance sensor resolution calibration experiment.The above results show that the calibration method is feasible and practical.
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2023, Vol. 44 
