AFM轻敲模式下扫描参数对成像质量影响的研究

doi:10.3969/j.issn.1000-1158.2020.07.04

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摘要针对原子力显微镜(AFM)扫描参数对成像质量的影响规律,对现有的扫描参数影响成像质量的研究进行了分析。提出了以幅值误差作为评价AFM成像质量的指标,通过实验研究了扫描参数对AFM成像质量的耦合影响。发现了扫描频率fs、积分增益I和幅值设定点S这3个扫描参数间相互影响的现象,在S低较低情况下可设置更大的fs和I,在获取高质量成像的同时,提升了测量效率,对扫描参数的合理设置提供了可靠的操作准则。

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	陈建超
	安小广
	冯世绪
	王加春

关键词 ：计量学;原子力显微镜;扫描参数;成像质量;轻敲模式, 幅值误差

Abstract：The influence of scanning parameters on the atomic force microscopy(AFM) imaging quality is reviewed and analyzed. A novel amplitude error indicator that is employed to evaluate the AFM imaging quality is proposed. The coupling effect of scanning parameters on imaging quality is investigated with experiments. The result reveals the interaction effect between the three scanning parameters like scanning frequency(fs), integral gain(I), and amplitude set point(S), i.e. the larger I and fs can be set at low S, which implies that the optimal balance between imaging quality and measurement efficiency is achievable. The result also provides practical guidelines for the reasonable setting of scanning parameters in AFM imaging.

Key words： metrology AFM scanning parameters imaging quality tapping mode amplitude error

收稿日期: 2019-03-26 发布日期: 2020-06-29

PACS:

TB92

基金资助:河北省自然科学基金(E2018203440/E2018203403);河北省高等学校自然科学研究青年基金(QN2016004);中央高校基本科研业务费专项资金(30917014101);燕山大学青年教师自主研究计划(15LGB001)

通讯作者: 王加春(1968-),男,黑龙江巴彦人,燕山大学教授,硕士生导师,主要从事超精密测量与加工技术方面的研究。 Email: wjczth@ysu.edu.cn E-mail: chenjc@ysu.edu.cn

作者简介: 陈建超(1984-),男,河北丰润人,燕山大学副教授,硕士生导师,主要研究方向为超精密测量与加工技术。Email: chenjc@ysu.edu.cn

引用本文:

陈建超,安小广,冯世绪,王加春. AFM轻敲模式下扫描参数对成像质量影响的研究[J]. 计量学报, 2020, 41(7): 789-795.
CHEN Jian-chao,AN Xiao-guang,FENG Shi-xu,WANG Jia-chun. Research on the Influence of Scanning Parameters on Imaging Quality in AFM Tapping Mode. Acta Metrologica Sinica, 2020, 41(7): 789-795.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2020.07.04 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2020/V41/I7/789

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