@article{陈建超:789, author = {陈建超,安小广,冯世绪,王加春}, title = {AFM轻敲模式下扫描参数对成像质量影响的研究}, publisher = {计量学报}, year = {2020}, journal = {计量学报}, volume = {41}, number = {7}, eid = {789}, numpages = {6}, pages = {789}, keywords = {计量学;原子力显微镜;扫描参数;成像质量;轻敲模式; 幅值误差}, url = {http://jlxb.china-csm.org:81/Jwk_jlxb/CN/abstract/article_1689.shtml}, doi = {10.3969/j.issn.1000-1158.2020.07.04} }