Abstract：Accurate measurement of nano-geometric structure is the key technical support to improve the quality and performance of integrated circuits, micro-nano electromechanical systems and micro-nano technology products.In order to obtain accurate measurement results, it is necessary to realize the measurement value traceability and built the value transfer system.To meet the metrology requirements of nanometer geometry structure from small to large range, the metrological calibration device for nano-geometrical characteristic size in millimeter range is developed which integrated with multi-degree of freedom (multi-DOF) laser interferometry system, and the results can be traced to SI units.The results shows that the device can achieve the measurement accuracy in nanoscale in the measurement range in millimeter level, and the resolution is achieved sub-nanometer scale.
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2020, Vol. 41 
