准确的纳米几何结构测量是提高集成电路、微纳机电系统和微纳技术产品的质量和性能的关键技术支撑,为了得到准确一致的测量结果,必须实现纳米尺度的量值溯源并建立量值的传递体系。为满足纳米几何结构计量从纳米尺度到毫米尺度的跨尺度计量需求,实验室研制了毫米级纳米几何特征尺寸计量标准装置,集成于该装置中的多自由度激光干涉计量系统,实现了测量结果向米定义SI单位的直接溯源。实验结果表明该系统能够在毫米级的测量范围内,实现纳米级的测量准确度,分辨力达到了亚纳米量级。
Abstract
Accurate measurement of nano-geometric structure is the key technical support to improve the quality and performance of integrated circuits, micro-nano electromechanical systems and micro-nano technology products.In order to obtain accurate measurement results, it is necessary to realize the measurement value traceability and built the value transfer system.To meet the metrology requirements of nanometer geometry structure from small to large range, the metrological calibration device for nano-geometrical characteristic size in millimeter range is developed which integrated with multi-degree of freedom (multi-DOF) laser interferometry system, and the results can be traced to SI units.The results shows that the device can achieve the measurement accuracy in nanoscale in the measurement range in millimeter level, and the resolution is achieved sub-nanometer scale.
关键词
计量学 /
纳米几何特征尺寸 /
多自由度激光干涉系统 /
激光干涉仪修正 /
计量标准装置
Key words
metrology /
nano-geometrical characteristic size /
multi-DOF laser interferometry system /
correction of laser interferometer /
metrological standard devicemetrology /
nano-geometrical characteristic size /
multi-DOF laser interferometry system /
correction of laser interferometer /
metrological standard device
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基金
国家重点研发计划(2018YFF0212302,2016YFF0200602);中国计量科学研究院基本科研业务费项目(31-AKY1605)
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