Study on Approaching Characteristics between the Tip and the Surface of Atomic Force Microscope Based on Tuning Fork Probe
SHI Hui1,2,GAO Si-tian2,HUANG Lu2,SHEN Xiao-yan1
1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China
Abstract：In the study of atomic force microscopy, the micro-force detection in the approaching process between the tip and the sample is the basis for accurate measurement of the sample morphology. A dynamic equation was established based on the characteristics of tuning fork probe and Simulink software was used to simulate the amplitude response. Experimental device of approaching curve and program of controlling displacement system and acquiring data from lock-in amplifier were designed independently. In the AM mode, the curves under different excitation voltages were obtained. Under the excitation of 25, 50, 75 and 100mV, the working distance of the probe is 4.12,5.1,5.95,7.6nm respectively, and the forms are in conformity with the simulation.
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SHI Hui,GAO Si-tian,HUANG Lu,SHEN Xiao-yan. Study on Approaching Characteristics between the Tip and the Surface of Atomic Force Microscope Based on Tuning Fork Probe. Acta Metrologica Sinica, 2020, 41(5): 524-528.
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2020, Vol. 41 
