一种三维激光区域扫描仪性能的快速评价方法

doi:10.3969/j.issn.1000-1158.2019.6A.006

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摘要三维激光区域扫描仪由于非接触方式并短时间内获得大量采样点已被广泛应用在先进制造领域。国内尚未出台针对三维激光区域扫描仪的校准规范,致使其几何量值处于相应尺寸溯源体系之外。在充分考虑到扫描视场、扫描角度、扫描深度、被测特征表面等影响因素,提出了一种三维激光区域扫描仪性能的快速评价方法。该方法基于线性间距球靶标准器,给出了系统探测误差、尺寸误差、长度测量误差以及球间距误差的数学表达。为验证测量方法的精度和可靠性,对3家企业生产的激光区域扫描仪进行大样本检测试验。测试结果显示重复性测量误差优于5.0 μm,测量不确定度低于15.0 μm,单次检测时间低于0.5h,证明了该评价方法的有效性及实践操作的可行性。

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	周森
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关键词 ：计量学, 三维激光区域扫描, 球靶, 尺寸溯源, 误差, 性能评价

Abstract：3D-laser area scanning techniques have been widely studied in academia and applied in industrial fields because of the benefits of fast massive acquisition of points, non-contact operation, and automatic data processing. However, the procedures for evaluation and verification of 3D-laser area scanner have not been well-established, because of many influencing factors such as scan depth, incident angle, scanners orientation and surface properties of measured area. A typical artifact with multiple spherical features made of ceramic has been introduced for determination of the sphere-spacing error and flatness measurement error. A 3D coordinate system was established by the orientation and the relative position between scanner and those spheres. A series of representative experiments were carried out on commercial 3D-laser area scanners produced by three corporations. The experimental results showed that the system sphere spacing repeatability error was better than 5.0μm, measurement uncertainty was less than 15.0μm, and the time for one test was less 0.5h. The evaluation procedure was easy-operator and effective.

Key words： metrology 3D-laser area scanning ball bar dimension traceability error performance evaluation

收稿日期: 2019-09-20

PACS:

TB921

基金资助:重庆市科研院所绩效激励引导专项（cstc2017jxj1770004）;重庆市市场监督管理局科研计划项目（No.CQZJKY2018005）

作者简介: 周森(1986-),男,江苏徐州人,博士,重庆市计量质量检测研究院高级工程师,主要研究方向为微纳几何量计量、长度计量、激光测量。Email: zhousen@cqu.edu.cn

引用本文:

周森, 徐健, 陶磊, 陈龙, 熊乙锟. 一种三维激光区域扫描仪性能的快速评价方法[J]. 计量学报, 2019, 40(6A): 29-32.
ZHOU Sen, XU Jian, TAO Lei, CHEN Long, XIONG Yi-kun. A Fast Performance Evaluation Method for 3D-laser Area Scanning System. Acta Metrologica Sinica, 2019, 40(6A): 29-32.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2019.6A.006 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2019/V40/I6A/29

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