Calibration Method of Spindle Rotation Error Analyzer
YUAN Xing-qi1,SHU Hong-lin1,2,CUI Jian-jun2,YAN Yong-gang1, MAO Bin3,CHEN Kai2,SHAO Hong-wei2
1. School of Mechanical Engineering,Henan Polytechnic University, Jiaozuo, Henan 454000,China
2. National Institute of Metrology,Beijing 100029,China
3. Shaanxi Institute of Metrology Science,Xian, Shaanxi 710065,China
Abstract：In view of the difficult calibration of the spindle rotary error analyzer for ultra-precision machine tools, the system composition and measurement principle of the spindle rotary error analyzer were analyzed, and a calibration method based on indication error, linearity and repeatability was proposed. A special calibration device was built, the device uses nanometer micro-motion table to drive the displacement. Using high precision laser interferometer as measurement standard, the measuring line conforms to Abbe principle, it can be realized under normal experimental conditions. The optimal measuring ability is better than 10 nm in the displacement range of ±1 mm, and the stability of the indication value is better than 2 nm in 10 minutes. The calibration test of spindle rotation error analyzer was carried out, and the evaluation method of uncertainty was given. The calibration method and device can meet the requirements of spindle rotation error analyzer and various nanometer displacement sensors and instruments.
［1］Nakkiewa W, Lin C W, Tu J F. A new method to quantify radial error of a motorized end-milling cutter/spindle system at very high speed rotations［J］. International Journal of Machine Tools & Manufacture, 2006, (46): 877-889.
［2］Yin Z Q, Li S Y. High accuracy error separation techniquefor on-machine measuring straightness［J］. Precision Engineering, 2006, 30(2): 192－200.
［3］孙郅佶, 安晨辉, 杨旭, 等.超精密机床主轴回转误差在线测试与评价技术［J］. 制造技术与机床, 2015, (9): 118-123.
Sun Z J, An C H, Yang X, et al. On line testing and evaluation technology for spindle rotation error of ultra precision machine tools［J］. Manufacturing Technology & Machine Tool, 2015, (9): 118-123.
［4］伍良生, 杨勇, 周大帅. 机床主轴径向回转误差的测试与研究［J］. 机械设计与制造, 2009, (1): 107-109.
Wu L S, Yang Y, Zhou D S. Measurement and study of the radial rotation error of the spindle of a machine tool［J］. Machinery Design & Manufacture, 2009, (1): 107-109.
［5］郑义忠. 电容式传感器原理及应用［M］. 天津: 天津大学出版社, 1986.
［6］李兵, 孙彬, 陈磊, 等. 激光位移传感器在自由曲面测量中的应用［J］. 光学精密工程, 2015, 23(7): 1939-1947.
Li B, Sun B, Chen L, et al. Application of Laser Displacement Sensor in Freeform Surface Measurement［J］. Opt Precision Eng, 2015, 23(7): 1939-1947.
［7］Cui J J, Qu X H, Kang Y H. Performance test for nanometer accuracy capacitance displacement sensor［J］. Key Engineering Materials, 2014, 609-610: 898-902.
［8］JJG 570-2006 电容式测微仪检定规程［S］.
［9］JJG 1059-1999 测量不确定度评定与表示［S］.
［10］崔建军, 刘香斌, 康岩辉, 等. 激光干涉仪空气折射率补偿系统的校准方法［J］. 计量学报, 2014, 35(3): 210-215.
Cui J J, Liu X B, Kang Y H, et al. Calibration method of laser interferometer air refractive index compensation system［J］. Acta Metrologica Sinica, 2014, 35(3): 210-215.
［11］葛川, 张德福, 李朋志, 等. 电容式位移传感器的线性度标定与不确定度评定［J］.光学精密工程, 2015, 23(9): 2546-2552.
Ge C, Zhang D F, Li P Z, et al. Linearity calibration and uncertainty evaluation of capacitive displacement sensor［J］. Opt Precision Eng, 2015, 23(9): 2546-2552.
［12］崔建军, 高思田. 线位移传感器校准及不确定度分析［J］. 计量学报, 2010, 31(6): 169-173.
Cui J J, Gao S T. Calibration and uncertainty analysis of line displacement sensor［J］. Acta Metrologica Sinica, 2010, 31(6): 169-173.
2018, Vol. 39 
