The Research on the Superconducting Films for X-ray Superconducting Transition Edge Sensors
JIA E1, LI Wan2, HU Jiahao2, BAI Haijun1, CHEN Jian3, XU Xiaolong3, GUO Siming3, SUN Tianbao3, ZHAO Xiaobo3, LI Jinjin3, WANG Xueshen3
1.College of Information Engineering， Shenyang University of Chemical Technology， Shenyang， Liaoning 110142， China
2.College of Physics， Sichuan University， Chengdu， Sichuan 610064， China
3.Center for Advanced Measurement Science， National Institute of Metrology， Beijing 100029， China
Abstract：Ultra-high vacuum DC magnetron sputtering technology was employed to fabricate both superconducting Mo films and Mo/Au bilayer films， The influence of varying sputtering powers and pressures on film stress， surface roughness， and superconducting transition temperature was investigated. The results for superconducting Mo films revealed a stress range from -421 MPa to 163 MPa， surface roughness below 1 nm， critical temperatures between 1.06 K and 1.10 K. For the Mo/Au films， the stress varied from -38 MPa to 26 MPa， with critical temperatures ranging from 80 mK to 350 mK. The developed Mo/Au bilayer film provides a technical reserve for the development of single-energy X-ray superconducting transition edge sensors（TES）.
贾娥, 李万, 胡家昊, 白海军, 陈建, 徐骁龙, 郭思明, 孙天宝, 赵晓波, 李劲劲, 王雪深. X射线超导转变边沿传感器超导薄膜研究[J]. 计量学报, 2025, 46(1): 69-74.
JIA E, LI Wan, HU Jiahao, BAI Haijun, CHEN Jian, XU Xiaolong, GUO Siming, SUN Tianbao, ZHAO Xiaobo, LI Jinjin, WANG Xueshen1.College of Information Engineering， Shenyang University of Chemical Technol. The Research on the Superconducting Films for X-ray Superconducting Transition Edge Sensors. Acta Metrologica Sinica, 2025, 46(1): 69-74.
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2025, Vol. 46 
