Abstract：The research on the physical properties of superconducting films is the foundation for the development of X-ray superconducting transition edge sensors. Ultra-high vacuum DC magnetron sputtering technology was used to prepare superconducting Mo films under different sputtering powers and pressures. The Mo films were characterized for film stress, roughness, and critical temperature. The stress range of the Mo films was from -421 MPa to 163 MPa, and the critical temperature ranged from 1.05 K to 1.10 K. By selecting suitable preparation conditions for Mo films, Mo/Au bilayer films with different thicknesses were prepared and characterized. The Mo/Au bilayer films showed the stress range from -38 MPa to 26 MPa and the critical temperature range from 80 mK to 350 mK. Through the analysis of the above-mentioned characterization parameters, the suitablepreparation conditions for Mo/Au bilayer films have been obtained. The developed Mo/Au bilayer film meets the requirements for the fabrication of single-energy X-ray superconducting transition edge sensors.
2025, Vol. 46 
