Abstract：In order to solve the problems of accelerometer difficulty in achieving regular calibration, high calibration cost,and difficulty in meeting long-term work needs, the self-calibration method of piezoelectric accelerometer with drive port is studied. The principle of self-calibration method simulating external vibration excitation and the conversion sensitivity laboratory measurement method of the internal drive piezoelectric element of the sensor are explained, and based on the inverse piezoelectric effect of the driving piezoelectric element, the on-site in-situ calibration of the accelerometer can be realized by the electrical excitation of the sensor drive port,and the calibration results of the shaker calibration method are compared. The experimental results show that in the frequency range 5~10000Hz, the self-calibration sensitivity results are consistent with the vibration table sensitivity calibration results,and the error is within±2%,which verifies the effectiveness of the method.
HUANG X B, PAN G F, SI W J, et al. Design of Traverse Breeze Vibration Sensor Based on the Piezoelectric Accelerometer ［J］. High Voltage Apparatus, 2017, 53(4): 92-99.
ZHANG H, FENG H, DING L J, et al. Gear Fault Identification Based on Torsional Vibration Analysis Method［J］. Acta Metrologica Sinica, 2019, 40(2): 300-305.
PENG X D, ZHANG T M, LI J Y, et al. Field Calibration of Three-Axis MEMS Digital Acceleration［J］. Journal of Vibration, Measurement& Diagnosis, 2014, 34(3): 544-548.
LIANG Z G, LYU G Y, YIN X, et al. A Novel on Site Calibration Method by Using Double Stimulations ［J］. Acta Metrologica Sinica, 2019, 40(1): 140-145.
ZHANG X F, JIANG W Q, HU T E, et al. Optimization Design of Non-uniform Air Gap Magnetic Field for Low-Frequency Electromagnetic Vibrator［J］. Acta Metrologica Sinica, 2022, 43(1): 85-91.
［8］
Methods for the calibration of vibration and shock transducers-Part45: In-situ calibration of transducers with built in calibration coil:ISO 16063-45［S］. 2017.
Methods for the Calibration of Vibration and Shock Transducers-Part21: Vibration Calibration by Comparison To a Reference Transducer:ISO 16063-21［S］.
［3］
GHEMARI Z, SAAD S, KHETTAB K. Improvement of the Vibratory Diagnostic Method by Evolution of the Piezoelectric Sensor Performances ［J］. International Journal of Precision Engineering and Manufacturing, 2019, 20(8): 1361-1369.
HU H B, SUN Q, BAI J. Dynamic Calibration of Accelerometer Using Short Shock Excitation［J］. Acta Metrologica Sinica, 2017, 38(2): 184-188.
［12］
REGUIEG S K, GHEMARI Z, BENSLIMANE T, et al. Modeling and Enhancement of Piezoelectric Accelerometer Relative Sensitivity ［J］. Sensing and Imaging, 2019, 20(1): 1-14.
［14］
Methods for the Calibration of Vibration and Shock Transducers-Part11: Primary Vibration Calibration by Laser Interferometry:ISO 16063-11［S］.
2024, Vol. 45 
