高品质因子氟化镁晶体微腔制备与测试

doi:10.3969/j.issn.1000-1158.2023.08.03

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摘要研制了基于直线电机、高精度光栅尺、力学反馈单元的精密自动磨抛系统。在制备晶体微腔时,该系统可准确控制晶体微腔的尺寸、厚度及外形。采用预成型、粗磨、粗抛以及精抛等步骤制备了具有高品质因子的氟化镁晶体梯形微盘腔。利用白光干涉仪表征精抛后的氟化镁晶体表面粗糙度为2.84nm。通过搭建锥形光纤与晶体微腔耦合测试系统,采用光腔衰荡方法测得所制备的晶体微腔在1550nm处的本征品质因子为4.55×10⁸。

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	瞿志二
	潘奕捷
	刘贤文
	张诚
	王瑾
	屈继峰

关键词 ：计量学, 光学微腔, 氟化镁晶体, 高品质因子, 精密磨抛

Abstract：Based on a linear motor, a high precision scale and a mechanical feedback unit, a precision automatic grinding and polishing system was developed. The system enabled accurately control the size, thickness and shape of the crystal microcavities during preparation. The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming, rough grinding, rough polishing and fine polishing. The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2.84nm using a white light interferometer. By setting up a taper fiber and crystal microcavity coupling testing system, the quality factor of the prepared crystal microcavity was measured to be 4.55×10⁸ at 1550nm by the optical cavity ring-down method.

Key words： metrology optical microcavity MgF2 crystal high quality factor precision polishing

收稿日期: 2023-01-03 发布日期: 2023-08-22

PACS:

TB96

基金资助:国家重点研发计划(2022YFF0608304, 2021YFA1401200);国家自然科学基金(62075206, 62205324, 62105023)

通讯作者: 潘奕捷（1980-), 男, 北京人,中国计量科学研究院副研究员,主要从事微腔光子测温与芯片级量子计量方面的研究。Email:panyijie@nim.ac.cn E-mail: panyijie@nim.ac.cn

作者简介: 瞿志二（1998-), 男, 湖北黄冈人,北京理工大学在读硕士研究生,研究方向为晶体微腔加工及应用。Email:3220200451@bit.edu.cn

引用本文:

瞿志二,潘奕捷,刘贤文,张诚,王瑾,屈继峰. 高品质因子氟化镁晶体微腔制备与测试[J]. 计量学报, 2023, 44(8): 1169-1175.
QU Zhi-er,PAN Yi-jie,LIU Xian-wen,ZHANG Cheng,WANG Jin,QU Ji-feng. Fabrication and Test of High Quality Factor MgF2 Crystal Microcavity. Acta Metrologica Sinica, 2023, 44(8): 1169-1175.

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