Research on Saturation Absorption Frequency Stabilization System Based on Rb MEMS Vapor Cell
LIU Ya-lei1,2,JIA Shuo2,JIANG Zhi-yuan2,WANG Jin2,WANG Jian-bo2,YUAN De-cheng1,LIN Ping-wei2,MA Ai-wen3,QU Ji-feng2
1. Shenyang University of Chemical Technology,Shenyang,Liaoning 110142,China
2. National Institute of Metrology,Beijing 100029,China
3. Chinese Society for Measurement,Beijing 100029,China
Abstract：A microfabricated rubidium (Rb) atomic vapor cell is fabricated through micro-electro-mechanical system (MEMS) fabrication technology, which is applied to saturated absorption spectra and laser frequency stabilization. To achieve the three cavities glass-silicon-glass ‘sandwich’ structure, deep reactive ion etching and anodic bonding processes are adopted. Saturated absorption spectra frequency stabilization system based on Rb MEMS atomic vapor cell is built with an external cavity semiconductor laser with at 780nm. The MEMS vapor cell is heated and temperature controlled, and the saturated absorption spectra at different temperatures and optical powers are analysed. The experiment adopts the beat frequency method by two lasers after the laser frequency is locked through lock-in amplifier to evaluate the performance of the system. Experimental result shows that frequency stability of 1s and 100s integration time is 2.7×10-11 and 6.3×10-12.
刘亚蕾,贾朔,蒋志远,王瑾,王建波,袁德成,林平卫,马爱文,屈继峰. 基于MEMS原子气室的饱和吸收稳频系统研究[J]. 计量学报, 2023, 44(8): 1272-1276.
LIU Ya-lei,JIA Shuo,JIANG Zhi-yuan,WANG Jin,WANG Jian-bo,YUAN De-cheng,LIN Ping-wei,MA Ai-wen,QU Ji-feng. Research on Saturation Absorption Frequency Stabilization System Based on Rb MEMS Vapor Cell. Acta Metrologica Sinica, 2023, 44(8): 1272-1276.
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2023, Vol. 44 
