Research on the Properties of Ti Superconducting Thin Films in SiO2-SiNx System Optical Resonator
LIU Hai-yan1,SUN Xiao-ying2,3,LI Jing-jing2,WANG Xue-shen2,CHEN Jian2,GAO He2,ZHOU Zhe-hai1,XU Xiao-long2
1. Beijing Information Science and Technology University, Beijing 100192, China
2. National Institute of Metrology, Beijing 100029, China
3. Shenyang University of Chemical Technology, Shenyang, Liaoning 110142, China
Abstract：Well-designed optical cavity is an effective method to improve the optical efficiency of superconducting transition edge sensor (TES). Changes in the multi-layer films' thickness of the optical cavity affect not only the optical efficiency but also the superconducting performance of TES due to the changes in film's stress. The Ti film is selected as the superconducting material of the TES functional layer due to its excellent characteristics at low temperature. Also, the SiO2-SiNx system is selected as the optical cavity film. Through the numerical simulation of the film thickness, the influence of the thickness of the SiO2-SiNx system optical resonator film on the optical absorption efficiency of Ti-TES is determined. Analyzed the tendency of the stress of the SiO2-SiNx system optical resonator with different film thicknesses, and finally prepared TES with different thicknesses of the SiO2-SiNx optical resonator, and tested the optical absorption efficiency to verify the SiO2-SiNx The influence of the film thickness of the system optical resonator on the Ti-TES optical absorption efficiency.
刘海燕,孙潇莹,李劲劲,王雪深,陈建,高鹤,周哲海,徐骁龙. SiO2-SiNX体系光学谐振腔对Ti超导薄膜特性的研究[J]. 计量学报, 2023, 44(4): 549-554.
LIU Hai-yan,SUN Xiao-ying,LI Jing-jing,WANG Xue-shen,CHEN Jian,GAO He,ZHOU Zhe-hai,XU Xiao-long. Research on the Properties of Ti Superconducting Thin Films in SiO2-SiNx System Optical Resonator. Acta Metrologica Sinica, 2023, 44(4): 549-554.
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2023, Vol. 44 
