Abstract：The LRRM calibration algorithm is researched, the measurement model of load standard is improved, the measured result is translated from the middle of the DUT to the probe tip by reference surface translation, and the calibration software is compiled based on MATLAB. The on-wafer scattering parameter measurement system is calibrated by the researched calibration method and commercial calibration method, and the same short calibration standard and attenuator are measured. The results show that at the frequency of 110MHz~110GHz, the maximum deviation of reflection magnitude is 0.02, and the maximum deviation of reflection phase is 0.3 degree, the maximum deviation of the transmission magnitude is 0.05dB, and the maximum deviation of transmission phase is 0.5 degree, which can meet the demand of on-wafer scattering parameter calibration and measurement.
［1］ Williams D F, Marks Roger B. Compensation for substrate permittivity in probe-tip calibration ［C］//44th ARFTG Conference Digest, Boulder, CO, USA, 1994: 20-30.
［2］ Williams D F, Marks R B. Calibrating On-Wafer Probes to the Probe Tips ［C］//40th ARFTG Conference Digest, Orlando, FL, USA, 1992: 136-143.
［3］ Williams D F, Marks R B. Comparison of on-wafer calibrations ［C］//38th ARFTG Conference Digest, San Diego, CA, USA, 1991: 68-81.
［4］ Deal W R, Farkas D S. A simple CAD-based method to develop and evaluate calibration standards［J］. IEEE Microwave Magazine, 2006, 7(3): 70-84.
［5］ Padmanabhan S, Kirby P, Daniel J, et al. Accurate Broadband On-wafer SOLT Calibrations with Complex Load and Thru Models［C］//61st ARFTG Conference Digest, 2003: 5-10.
［6］ 刘晨, 吴爱华, 孙静, 等. 宽带在片SOLT校准件研制及表征［J］. 计量学报, 2017, 38(1): 98-101.
Liu C, Wu A H, Sun J, et al. Manufacture and characterize of broadband on-wafer SOLT calibration standards ［J］. Acta Metrologica Sinica, 2017, 38(1): 98-101.
［7］ Davidson A, Jones K, Strid E. LRM and LRRM calibration with automatic determination of load inductance ［C］//36th ARFTG Conference Digest, 1990: 57-63.
［8］ Marks R B. A multiline method of network analyzer calibration ［J］. Microwave Theory and Techniques, 1991, 39(7): 1205-1215.
［9］ Pence J E. Verification of LRRM Calibrations with Load Inductance Compensation for CPW Measurements on GaAs Substrates ［C］//42th ARFTG Conference Digest, San Jose, CA, USA, 1993: 1-9.
［10］ Safwat A M E, Hayden L. Sensitivity Analysis of Calibration Standards for SOLT and LRRM ［C］//58th ARFTG Conference Digest, San Diego, CA, USA, 2001: 1-10.
［11］ Purroy F, Pradell L. New Theoretical Analysis of the LRRM Calibration Technique for Vector Network Analyzers ［J］. IEEE Transactions on Instrumentation and Measurement, 2001, 50(5): 1307-1314.
［12］ 高杨, 蔡洵, 贺学锋, 等. 体声波滤波器的片上测试与性能表征 ［J］. 压电与声光, 2015, 37(5): 729-733.
Gao Y, Cai X, He X F, et al. On-wafer test and characterization of bulk acoustic wave filter［J］. Piezoelectrics & Acoustooptics, 2015, 37(5): 729-733.
［13］ 蔡洵, 高杨, 黄振华, 等. 薄膜体声波谐振器的测试与表征［J］. 微纳电子技术, 2015, 52(10): 660-665.
Cai X, Gao Y, Huang Z H, et al. Measurement and characterization of the film bulk acoustic wave resonator ［J］. Micronanoelectronic Technology, 2015, 55(10): 660-665.
［14］ 胡江, 孙玲玲. 一种用于在片器件直接测量的新型SOLT校准方法 ［J］. 微波学报, 2006, 22: 135-137.
Hu J, Sun L L. A novel SOLT calibration for direct measurement of on-wafer DUTs［J］. Journal of Microwaves, 2006, 22: 135-137.
［15］ 栾鹏, 王一帮, 梁法国, 等. 共面波导传输线电容准确测量及不确定度分析［J］. 计量学报, 2018, 39(2): 272-275.
Luan P, Wang Y B, Liang F G, et al. Coplanar Waveguide Transmission Line Capacitance Measurement and Uncertainty Analysis ［J］. Acta Metrologica Sinica, 2018, 39(2): 272-275.
［15］ 王一帮, 栾鹏, 孙静, 等. 在片Multi-TRL校准技术研究［J］. 中国测试, 2018, 44(4): 8-13.
Wang Y B, Luan P, Sun J, et al. Research for on-wafer Multi-TRL calibration technology ［J］. Acta Metrologica Sinica, 2018, 44(4): 8-13.
［16］ 刘晨, 孙静, 吴爱华, 等. 单片电路晶体管模型参数提取专用TRL校准件［J］. 计算机与数字工程, 2015, 43(1): 21-23.
Liu C, Sun J, Wu A H, et al. Special TRL standards for monolithic transistors modeling［J］. Computer & Didital engineering, 2015, 43(1): 21-23.
［17］ 殷玉喆, 张旭勤, 高猛, 等. GaAs衬底共面波导S参数标准样片研制［J］. 微波学报, 2017, 33(5): 44-49.
Yin Y Z, Zhang X Q, Gao M, et al. Research on GaAs co-planar waveguide S parameter standard［J］. Journal of Microwaves, 2017, 33(5): 44-49.
［18］ 卢俊锋. 微波平面电路网络S参数测试校准方法的研究 ［D］. 西安: 西安电子科技大学, 2011.
［19］ 王一帮, 栾鹏, 吴爱华, 等. 基于Multi-TRL算法的传输线特征阻抗定标［J］. 计量学报, 2017, 38(2): 225-229.
Wang Y B, Luan P, Wu A H, et al. An Accurate Determination Method of Characteristic Impedance of Transmission Line on Multi-TRL Aligorithms ［J］. Acta Metrologica Sinica, 2017, 38(2): 225-229.
［20］ 王一帮, 周瑞,陈婷, 等. 110GHz在片16项误差模型校准件定值方法研究［J］. 计量学报, 2021, 42(3): 365-369.
Wang Y B, Zhou R, Chen T, et al. Investigation into Definition Method for On-wafer 16-term Error Model Calibration Kits Below 110GHz［J］. Acta Metrologica Sinica, 2021, 42(3): 365-369.
［21］ Marks R B. Formulations of the Basic Vector Network Analyzer Error Model including Switch-Terms［C］//50th ARFTG Conference Digest, 1997: 115-126.
2022, Vol. 43 
