Research on PSD-based Straightness Measurement Method of Separated Long Guide Rail
JIN Ting1,2,ZHU Jin1,2,CHEN Ting1,2,GUO Bin1,2,SHEN Bin3,KONG Ming4,CHENG Yinbao4,WANG Yinghui1,2
1. Zhejiang Institute of Metrology,Hangzhou,Zhejiang 310018,China
2.Key Laboratory of Digital Precision Measurement Technology of Zhejiang Province, Hangzhou, Zhejiang 310018, China
3. Hangzhou Optical Ruler Technology Co., Ltd., Hangzhou, Zhejiang 310018, China
4.China Jiliang University, Hangzhou, Zhejiang 310018, China
Abstract：The measuring range of the PSD-laser collimation measuring system can be expanded by using the piecewise splicing measurement method.Compared with the traditional method of measuring the straightness of long guide rails, the mentioned method can be used to measure the straightness of both continuous guide rails and separated superlong guide rails. Firstly, in the measuring range of (-5~+5)mm, the horizontal and vertical displacements of the receiving target of the laser collimation measurement system are respectively measured by the laser interferometer, and the errors are better than ±(1μm+1%H). Then, the straightness measurement accuracy is compared with that of the laser collimation measurement system in the range of 40m. The deviation of straightness in the horizontal direction is 0.06mm, and the deviation of straightness in the vertical direction is 0.13mm. Finally, the horizontal straightness is 0.50mm and the vertical straightness is 0.53mm on the 70m separated ultralong guide rail. The method can quickly locate and adjust the position of the extreme point of straightness error, and can effectively solve the problem of straightness assembly and debugging of separated ultralong guide rails.
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2024, Vol. 45 
