YANG Pinhong1,2,TANG Bo1,CUI Jianjun2,4,CHEN Kai2,SONG Peijie3,PENG Lu5
1. College of Metrology and Measurement Engineering,China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China;3. Gansu Academy of Metrology, Lanzhou, Gansu 730071, China
4. Tibet Autonomous Region Institute of Metrology and Testing, Lhasa, Xizang 850010, China
5. Reearch Insitute of Highway Ministry of Transport, Beijing 100029, China
Abstract：Aiming at the problem of lack of calibration device and method for high accuracy spectral confocal sensor, a calibration method based on laser interferometry is proposed and the corresponding calibration device is developed. On the one hand, a wavelength multiples interval measurement method is proposed, by displacement feedback control, the displacement interval is set as an integer multiple of the laser wavelength, so as to reduce the influence of nonlinear error of laser interferometer on measurement. On the other hand, the measuring point correction algorithm is proposed to eliminate the influence of the displacement standard value on the measurement due to the limitation of the positioning accuracy of the calibration device. Experimental results demonstrate that within the measurement range of 0～100μm, the indication error is ±23nm, repeatability is 5nm, and the expanded uncertainty of the indication error measurement results is U2=7.0nm (k=2). The uncertainty of indication error measurement results for the constructed calibration device within the measurement range of 0～50mm is U1=3.0nm+2×10-7L (k=2).
CHEN Z Z, WANG Z D, REN M J, et al. Development of an on-machine measurement system for ultra-precision machine tools using a chromatic confocal sensor ［J］. Precision engineering, 2022, 74: 232-241.
ZHOU Y, LI J J, ZHAO T M, et al. A Method of On-line Integration Roughness Measurement Based on Chromatic Spectrμm Confocal ［J］. Acta Metrologica Sinica, 2019, 42(6): 753-758.
BIN Z, LI J Y, MAO X X, et al. Dynamic pressure surface deformationmeasure-ment based on a chromatic confocal sensor［J］. Appl Opt, 2023, 62: 1467-1474.
NI H, ZHAO W, QIU L. Measurement method of spindle motion error based on composite laser target ［J］. International Journal of Machine Tools and Manufacture, 2022, 174: 182, 103860.
［14］
BAI J, LI X, WANG X, et al. Self-reference dispersion correction for chromatic confocal displacementmeasure-ment ［J］. Optics and Lasers in Engineering, 2021, 140: 106540.
［15］
XI M, WANG Y, LIU H, et al. Calibration of beam vector deviation for four-axis precision on-machine measurement using chromatic confocal probe ［J］. Measurement, 2022, 194: 111011.
［16］
WANG Z, WANG T, YANG Y, et al. Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System ［J］. Sensors, 2022, 22: 6794.
［1］
TSAO C C, TSENG Y C, CHEN Y S, et al. Precision Low-Cost Compact Micro-Displacement Sensors Based on a New Arrangement of Cascaded Levers with Flexural Joints ［J］. Sensors, 2022, 23(1): 326-335.
WANG D, CUI J J, ZHANG F M, et al. Review of Michelson Laser Interferometer forMicro Displacement Measurement ［J］. Acta Metrologica Sinica, 2021, 42 (1): 1-8.
［13］
LI C, LI G, LIU J, et al. Influence of eccentricity and tilt of radial GRIN lens on its thickness measurement by chromatic confocal technology ［J］. Optical Engineering, 2021, 60(9): 094107-094107.
YAN Y G, LIU Z H, ZHU X P, et al. Error tracing and calibration analysis of colorful spectral confocal Sensor ［J］. Journal of Henan Polytechnic University (Natural Science Edition), 2021, 40(5): 117-123.
YAN Y G, LIU Z H, ZHU X P, et al. Calibration and Comparison of a Spectral Confocal Sensor ［J］. 〗Acta Metrologica Sinica, 2019, 40(S1): 23-28.
ZHANG P, CUI J J. Research progress on nonlinear error compensation suppression and measurement of heterodyne interferometer ［J］. Laser and Optoelectronics Progress, 201, 58(11): 38-50.
YAN L P, ZHOU C Y, XIE J D, et al. Nonlinear error compensation method for PGC demodulation based on Kalman filter ［J］. Chinese Journal of Lasers, 20, 47(9): 14.
ZHENG Z Y, SHI Y S, GAO S T, et al. Research on Calibration Method of High-precision Capactive Displace-ment Sensor ［J］. Acta Metrologica Sinica, 2015, 36(1): 14-18.
2024, Vol. 45 
