针对高准确度光谱共焦传感器缺乏相应校准装置及方法的问题,提出了一种基于激光干涉测量的校准方法,并研制了相应的校准装置。一方面,提出了一种波长倍数间隔测量法,通过位移反馈控制将位移间隔设置为激光波长的整数倍,以减小激光干涉仪非线性误差对测量的影响;另一方面,提出了测点修正算法,消除了受检点处位移标准值因校准装置定位准确度限制不重合对测量的影响。实验结果表明:在0～100μm的测量范围内,示值误差为±23nm,重复性为5nm,示值误差测量结果的扩展不确定度U2=7.0nm(k=2)。构建的校准装置在0～50mm的测量范围内的示值误差测量结果不确定度为U1=3.0nm+2×10-7L(k=2)。
Abstract
Aiming at the problem of lack of calibration device and method for high accuracy spectral confocal sensor, a calibration method based on laser interferometry is proposed and the corresponding calibration device is developed. On the one hand, a wavelength multiples interval measurement method is proposed, by displacement feedback control, the displacement interval is set as an integer multiple of the laser wavelength, so as to reduce the influence of nonlinear error of laser interferometer on measurement. On the other hand, the measuring point correction algorithm is proposed to eliminate the influence of the displacement standard value on the measurement due to the limitation of the positioning accuracy of the calibration device. Experimental results demonstrate that within the measurement range of 0～100μm, the indication error is ±23nm, repeatability is 5nm, and the expanded uncertainty of the indication error measurement results is U2=7.0nm (k=2). The uncertainty of indication error measurement results for the constructed calibration device within the measurement range of 0～50mm is U1=3.0nm+2×10-7L (k=2).
关键词
几何量计量 /
光谱共焦传感器 /
干涉仪非线性 /
测点修正算法 /
测量不确定度
Key words
geometric metrology;spectral confocal sensor /
interferometer nonlinearity /
measuring point correction algorithm /
measurement uncertainty
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基金
西藏自治区科技计划项目(XZ202301YD0004C);中国计量科学研究院科研项目(AKYZD2307,AKYZZ2204)
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