Abstract：To improve the measurement accuracy of terahertz radiation spatial measurement setup, based on the detector scanning sampling setup, the impact factors existing in the terahertz radiation measurement setup are studied by using software simulation and experimental measurement. The concial reflector and terahertz absorption coating are used to reduce the influence of reflection on the measurement results, which can measure the spatial distribution of radiant power density more accurately.On this basis, the law of terahertz diffraction power density distribution with aperture is studied, and the aperture of terahertz transceiver equipment is reasonably optimized, which provides a research reference for the study of high-precision terahertz radiation spatial distribution measurement. Finally, the uncertainty of the beam width is analyzed, and the results show that the reflection in the system after eliminating the influence of reflection has little effect on the test results, the reflection introduction uncertainty is only 1.56%, and the relative standard uncertainty of the measurement system is obtained as 7.6%.
Liu Y, Lü Y J, Guo S S, et al. A novel AlGaN/GaN heterostructure field-effect transistor based on open-gate technology ［J］. Scientific Reports, 2021, 11: 22431.
［10］
王伟涛. 新型太赫兹参量源研究［D］. 济南:山东大学, 2015.
［22］
Deng Y Q, Sun Q, Yu J, et al. Broadband high-absorbance coating for terahertz radiometry ［J］. Optics Express, 2013, 21, 5737-5742.
［3］
Moon K, Do Y, Lim M, et al. Quantitative coherent scattering spectra in apertureless terahertz pulse near-field microscopes ［J］. Applied Physics Letters, 2012, 101 (1): 134-137.
Gao Y J, Fang B, Deng Y Q, et al. Calibration and Traceability of Responsivity for Terahertz Array Detector［J］. Acta Metrologica Sinica, 2021, 42(10):1265-1270.
Wu J L, Fang B, Li J M, et al. Research on Precision Measurement Technology of Terahertz Wavelength Based on Interferometry［J］.Acta Metrologica Sinica, 2022, 43(9): 1147-1153.
［4］
Jansen C, Wietzke S, Peters O, et al. Terahertz imaging: applications and perspectives ［J］. Applied Optics, 2010, 49 (19): 48-57.
［11］
Shamim A, Roy L, Fong N, et al. 24 GHz On-Chip Antennas and Balun on Bulk Si for Air Transmission ［J］. IEEE Transactions on Antennas & Propagation, 2008, 56 (2): 303-311.
［12］
Tsai Z M, Wu Y C, Chen S Y, et al. A V-Band On-Wafer Near-Field Antenna Measurement System Using an IC Probe Station ［J］. IEEE Transactions on Antennas & Propagation, 2013, 61 (4): 2058-2067.
［13］
Ladds K A, Nel H P, Stander T. A Novel E-band Nearfield Scanner for Wafer Probed On-Chip Antenna Characterisation［C］／／2016 10th European Conference on Antennas and Propagation (EuCAP).Davos, Switzerland, 2016, 1-4.
［15］
Klein B, Jenning M, Seiler P, et al. Verification and demonstration up to 67 GHz of an on-chip antenna pattern measurement setup［C］／／2014 IEEE Conference on Antenna Measurements & Applications (CAMA). Antibes Juan-les-Pins, France, 2014, 1-4.
［17］
Gulan H, Beer S, Diebold S, et al. Probe based antenna measurements up to 325 GHz for upcoming millimeter-wave applications［C］／／2013 International Workshop on Antenna Technology (iWAT). Karlsruhe, Germany, 2013: 228-231.
［19］
Ranvier S, Kyr M, Icheln C, et al. Compact 3-D On-Wafer Radiation Pattern Measurement System for 60 GHz Antennas ［J］. Microwave & Optical Technology Letters, 2010, 51 (2): 319-324.
［20］
Reniers A, Dommele A V, Smolders A B, et al. The Influence of the Probe Connection on mm-Wave Antenna Measurements ［J］. IEEE Transactions on Antennas and Propagation, 2015, 63 (9): 1-1.
［21］
Fischer B E, Lahaie I J, M. D. Huang, et al. Measurements corner: Causes of discrepancies between measurements and EM simulations of millimeter-wave antennas ［J］. IEEE Antennas & Propagation Magazine, 2014, 55 (6): 139-149.
［23］
Boehm L, Foerstner A, Hitzler M, et al. Reflection Reduction through Modal Filtering for Integrated Antenna Measurements above 100GHz ［J］. IEEE Transactions on Antennas & Propagation, 2017, 65 (7): 3712-3720.
Ferguson B, Zhang X C. Materials for terahertz science and technology ［J］. Nature Materials, 2002, 1 (1): 26-33.
［7］
Arindam B, Sayantan S, Aritra A, et al. 1.0 THz GaN IMPATT Source: Effect of Parasitic Series Resistance ［J］. Journal of Infrared, Millimeter, and Terahertz Waves, 2018, 39: 954-974.
Yan Z J,Shi W. Radiation characteristics of terahertz GaAs photoconductive antenna arrays［J］. Acta Physica Sinica, 2021, 70(24):344-352.
Gordon J A. Millimeter-wave near-field measurements using coordinated robotics ［J］. IEEE Trans. Antennas Propag, 2015, 63 (12): 5351-5362.
［16］
Titz D, Ferrero F, Luxey C. Development of a Millimeter-Wave Measurement Setup and Dedicated Techniques to Characterize the Matching and Radiation Performance of Probe-Fed Antennas ［J］. IEEE Antennas & Propagation Magazine, 2012, 54 (4): 188-203.
［18］
Qian J, Tang M, Chen Q, et al. Integration of S/Ka/D-Band Antennas in LTCC with a Cylindrical Radome for Triband Applications ［J］. IEEE Transactions on Antennas and Propagation, 2019, 67(9): 5781-5789.
2023, Vol. 44 
