适用于针尖增强拉曼的银针尖物理制备方法研究

doi:10.3969/j.issn.1000-1158.2022.11.02

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摘要提出两种可适用于针尖增强拉曼光谱(TERS)系统的拉曼针尖及其物理制备方法,制备针尖分别为银与镀银针尖。基于时域有限差分法(FDTD)仿真,对4种不同中间层材料、无中间层材料的不同膜厚镀银针尖及不同针尖曲率的银针尖进行仿真研究,并对入射光与针尖夹角,针尖与样品间距对电磁场增强的影响进行了探究。结果显示:以钛、铜为中间层膜厚为45nm的镀银针尖以及针尖曲率为55nm的银针尖具有最佳的电磁场增强效果。入射光与针尖夹角为39.27°,针尖与样品间距小于1nm时具有最佳的电磁场增强效果。基于仿真,采用磁控溅射成功制备以钛为中间层的镀银针尖,聚焦离子束(FIB)切割成功制备出银针尖。

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	祝敏豪
	高思田
	黄鹭
	胡佳成
	孙晓爽
	刘林伟

关键词 ：计量学;拉曼针尖;时域有限差分法;银针尖;聚焦离子束, 物理制备法

Abstract：Two Raman tips and their physical preparation methods that can be applied to the tip enhanced Raman spectroscopy (TERS) system are proposed, namely Ag and Ag-plated tips. Based on finite difference time domain (FDTD) simulation, without interlayer and four different interlayer materials, a simulation study of Ag-plated tips with different film thicknesses and Ag tip points with different tips point curvatures is carried out. The influence of the angle between the incident ray and the tip of the tip and the distance between the tip and the sample on the enhancement of the electromagnetic field is explored. The results show that the Ag-plated tip with a thickness of 45nm with titanium and copper as the intermediate layer and the Ag tip with a tip curvature of 55nm have the best electromagnetic field enhancement effect. The angle between the incident light and the tip is 39.27°, and the distance between the tip and the sample is less than 1nm, which has the best electromagnetic field enhancement effect. Based on simulation, magnetron sputtering is used to successfully prepare Ag-plated tips with titanium as the intermediate layer, and focused ion beam (FIB) cutting to successfully prepare Ag tips.

Key words： metrology;Raman tip;FDTD;Ag tips;FIB physical preparation methods

收稿日期: 2021-04-25 发布日期: 2022-11-14

PACS:

TB92

基金资助:国家重点研发计划(2016YFF0200602; 2016YFA0200901)

通讯作者: 高思田(1962-),男,天津人,中国计量科学研究院研究员, 主要从事纳米计量、材料计量,几何量计量研究。Email:gaositian@nim.ac.cn E-mail: gaost@nim.ac.cn

作者简介: 祝敏豪(1995-),男,浙江绍兴人,中国计量大学研究生,研究方向为几何量计量。Email:s1802080454@cjlu.edu.cn

引用本文:

祝敏豪,高思田,黄鹭,胡佳成,孙晓爽,刘林伟. 适用于针尖增强拉曼的银针尖物理制备方法研究[J]. 计量学报, 2022, 43(11): 1398-1403.
ZHU Min-hao,GAO Si-tian,HUANG Lu,HU Jia-cheng,SUN Xiao-shuang,LIU Lin-wei. Physical Preparation Methods of Ag Tips for Tip-Enhanced Raman Spectroscopy. Acta Metrologica Sinica, 2022, 43(11): 1398-1403.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2022.11.02 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2022/V43/I11/1398

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