Abstract：To achieve the effective open operation during the chip capacitance measurement, and enhance the veracity and coherence of the results, the on-wafer open method was researched. By analyzing the principle and structure of the standard capacitor and open termination, combined with the actual needs of semiconductor technical measurement, the on-wafer open instrument was designed and manufactured. Based on constructing the on-wafer capacitance test system, measurements on 1pF chip capacitance were conducted using traditional hanging open method and on-wafer open method. Results show that, compared with hanging open method, the on-wafer open method improves the veracity and coherence of test data, while the measuring repeatability achieves 0.01%, which offers an effective open method for chip capacitance metrology and measurement.
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2022, Vol. 43 
