Abstract:To achieve the effective open operation during the chip capacitance measurement, and enhance the veracity and coherence of the results, the on-wafer open method was researched. By analyzing the principle and structure of the standard capacitor and open termination, combined with the actual needs of semiconductor technical measurement, the on-wafer open instrument was designed and manufactured. Based on constructing the on-wafer capacitance test system, measurements on 1pF chip capacitance were conducted using traditional hanging open method and on-wafer open method. Results show that, compared with hanging open method, the on-wafer open method improves the veracity and coherence of test data, while the measuring repeatability achieves 0.01%, which offers an effective open method for chip capacitance metrology and measurement.
[1]杨雁, 黄璐, 王维, 等. NIM新一代二端对电容电桥装置[J]. 计量学报, 2020, 41(3): 284-289.
Yang Y, Huang L, Wang W, et al. The new two terminal pair capacitance bridge at NIM[J]. Acta Metrologica Sinica, 2020, 41(3): 284-289.
[2]赵承军. LCR测量仪校准的探讨[J]. 计量与测试技术, 2014, 41(1): 36-37.
Zhao C J. Discuss on the calibration of the LCR measuring instrument[J]. Metrology & Measurement Technique, 2014, 41(1): 36-37.
[3]Moodley S S, Will B, Veldman C S . Improving the mechanical stability of a standard capacitor[J]. IEEE Transaction and Measurement, 2003, 52(2): 392-395.
[4]Callegaro L, D′Elia V, Serazio D. 10-nF capacitance Transfer Standard[J]. IEEE Transaction on Instrument, 2005, 54(5): 1869-1872.
[5]戴冬雪, 王维, 金攀, 等. 标准电容器材料和结构的研究[J]. 电测与仪表, 2015, 52(16A): 97-103.
Dai D X, Wang W, Jin P, et al. Study on material and structure of standard capacitors[J]. Electrical Measurement & Instrumentation, 2015, 52(16A): 97-103.
[6]Rae D L, Han J K, Yu P S. New stable 10pF Gas-Dielectric capacitors[J]. IEEE Transactions on instrumentation and Measurement, 2001, 50(2): 294-297.
[7]戴冬雪. 国家电容标准的扩展频段计量技术研究[D]. 哈尔滨: 哈尔滨工业大学, 2006.
[8]辜明, 靳君. 四端对电容标准16380A和16380C低频定标、高频修正的理论推导[C]//北京市电子学会. 第二十届中国IT、网络、信息技术、电子、仪器仪表创新学术会议. 天津, 2006:138-140.
[9]Keysight Technologies. Keysight 16380A standard air capacitor set[Z]. USA: Keysight Technologiesinc, 2015.
[10]盛华庆, 张关汉. LCR测量仪测量夹具的补偿原理[C]//江苏省计量测试学会. 江苏省计量学术会议. 2008:131-134.
[11]汪源俊. LCR测量仪的短路、开路和负载校正的方法[J]. 教学与科技, 2011, 24(2): 14-18.
Wang J Y. The procedure for LCR meter open, short and load calibration methods[J]. Teaching and science technology, 2011, 24(2): 14-18.
[12]Joseph K, Afridi M Y, Chong J, et al. Test Chip to Evaluate Measurement Methods for Small Capacitances[C]//IEEE. IEEE International Conference on Microelectronic Test Structure. 2009: 243-245.
[13]戴冬雪, 阮永顺, 王祁. 四端对标准电容频率特性的校验理论及测定方法[J]. 计量学报, 2005, 26(3): 263-266.
Dai D X, Yuan Y S, Wang Q. Calibration theory and measurement method of the frequency characteristics of the four-pair-terminal strandard capacitor[J]. Acta Metrologica Sinica, 2005, 26(3): 263-266.
[14]胡敏, 李晓莹, 常洪龙, 等. 基于ASIC芯片的微小电容测量电路研究[J]. 计量学报, 2007, 28(4): 379-382.
Hu M, Li X Y, Chang H L, et al. Ultra-small capacitance sensing circuit based on a piece of ASIC[J]. Acta Metrologica Sinica, 2007, 28(4): 379-382.
[15]贺青,邵海明,梁成斌. 电磁计量学研究进展评述[J]. 计量学报,2021, 42(11): 1543-1552.
He Q, Shao H M, Liang C B. Review on the Research Progress of Electromagnetic Metrology[J]. Acta Metrologica Sinica, 2021, 42(11): 1543-1552.
[16]曾慧中. 铁电/AlGaN/GaN半导体异质薄膜的界面表征研究[D]. 成都: 电子科技大学, 2010.
[17]吴康, 李亚琭, 刘民. 串联电容法校准高值电容的不确定度分析[J]. 宇航计测技术, 2012, 32(5): 42-44.
Wu K, Li Y L, Liu M. Uncertainty analysis of high capacitance calibration by series capacitor method[J]. Journal of astronautic metrology and measurement, 2012, 32(5): 42-44.
[18]乔玉娥, 梁法国, 丁晨, 等. 片上皮法级电容测试系统专用标准件的研制[J]. 半导体检测与设备, 2019, 44(3): 232-238.
Qiao Y E, Liang F G, Ding C, et al. Development of On-chip Capacitance Standards for pF capacitance Test System[J]. Semiconductor testing and equipment, 2019, 44(3): 232-238.