Investigation into Definition Method for On-wafer 16-term Error Model Calibration Kits Below 110GHz
WANG Yi-bang1,ZHOU Rui1,CHEN Ting2,WU Ai-hua1,LIU Chen1,LIANG Fa-guo1
1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051, China
2. Beijing Microwave Metrology and Measurement Institute, Beijing 130022, China
Abstract：The conventional lumped parameter circuit model has been widely used in the definition of calibration kits for on-wafer probing. However, the accuracy of the defined model parameter is not great, due to the non-ideal circuit model and fitting algorithm used in extracting circuit parameters. A more accurate definition method is presented for 16-term calibration kits that is designed to correct the crosstalk at high frequencies. The new definition method is based on measurements of fabricated assistant multiline TRL calibration kits and full-wave simulations. The measurement system corrected by such defined 16-term calibration kits was compared with two-tier calibration method of Multiline TRL proposed by NIST. The results shows excellent agreement between these two techniques, i.e. the difference in transmission magnitude is within 0.30dB and the phase is within 1.0°. The proposed definition method offers appealing advantages over the NIST technique, in terms of smaller number of standards required and fewer movements of probes.
［1］Ginley R A. Establishing traceability for SOLT calibration kits［C］// ARFTG Microwave Measurement Symposium, 2018.
［2］Doerner R, Rumiantsev A. Verification of the wafer-level LRM+ calibration technique for GaAs applications up to 110GHz［C］// 65th ARFTG Conference Digest, 2005.
［3］Hayden L. An enhanced line-reflect-reflect-match calibration［C］// 67th ARFTG Conference Digest, 2006.
［4］Antonio M, Marco F, Marco G. Generalized Thru-Reflect-Line Calibration Technique for the Measurement of Multimodal Radiating Waveguides［J］. IEEE Antennas and Wireless Propagation Letters, 2017, 16: 844-847.
［5］Marks R B. A multiline method of network analyzer calibration ［J］. IEEE Trans Microwave Theory and Tech, 1991, 39(7): 1205-1215.
［6］Williams D F, Wang J C M, Arz U. An optimal multiline TRL calibration algorithm［C］// International Microwave Symposium Digest. 2003.
［7］Williams D F, Wang J C M, Arz U. An optimal vector-network-analyzer calibration algorithm［J］. IEEE Trans Microw Wave Theory Techn, 2003, 51(12): 2391-2401.
［8］Williams D F. Franz-Josef Schmuckle and Ralf Doerner. Crosstalk Corrections for Coplanar-Waveguide Scattering-Parameter Calibrations［J］. IEEE Trans Microwave Theory and Tech, 2014, 62(8): 1748-1761.
［9］Williams D F, Young A C, Urteaga M. A Prescription for Sub-Millimeter-Wave Transistor Characterization ［J］. IEEE Transactions On Terahertz and Technology, 2013, 3(4): 433-439.
［10］Butler J V, Rytting D K, Iskander M F, et al. “16-term error model and calibration procedure for on wafer network analysis measurements ［MMICs］” ［J］. IEEE MTT-S Int Microw Symp Dig, 1991, 39(3): 1125-1127.
［11］Butler J V, Rytting D K, Iskander M F, et al. “16-term error model and calibration procedure for on-wafer network analysis measurements” ［J］. IEEE Transactions on Microwave Theory and Techniques, 1991, 39(12): 2211-2217.
［12］Williams D F, Marks R B. LRM probe-tip calibration using nonideal standards ［J］. IEEE Trans Microw Wave Theory Techn, 1995, 43(2): 466-469.
［13］Deal W R, Farkas D S. A simple CAD-based method to develop and evaluate calibration standards［J］. IEEE Microwave Magazine, 2006, 7(3), 70-84.
［14］Williams D F, Marks R B. Transmission line capacitance measurement ［J］. IEEE microwave and guided wave letters, 1991, 1(9): 243-245.
［15］王一帮, 栾鹏, 吴爱华, 等. 基于Multi-TRL算法的传输线特征阻抗定标［J］. 计量学报, 2017, 38(2): 225-229.
Wang Y B, Luan P, Wu A H, et al. An Accurate Determination Method of Characteristic Impedance of Transmission Line Based on Multi-TRL Algorithms［J］. Acta Metrologica Sinica,2017,38(2):225-229.
［16］Rumiantsev A, Doerner R, Godshalk E M. The Influence of calibration substrate boundary conditions on CPW characteristics and calibration accuracy at mm-wave frequencies ［C］// ARFTG Microwave Measurement Symposium, 2009.
2021, Vol. 42 
