Design and Implementation of High Precision Air Refractive Index Measurement System
MIN Shuai-bo1,2,YAN Li-ping1,CUI Jian-jun2,WANG Dong3,SHU Hong-lin4,CHEN Kai2
1.Laboratory of Nanometer Measurement Technology, Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China
3. Academy of Precision Instruments and
Photoelectronics Engineering, Tianjin University, Tianjin 300072, China
4. School of Mechanical and Power, Henan Polytechnic University, Jiaozuo, Henan 454000, China
Abstract：Aiming at commercial air refractive index measuring device is affected by the acquisition performance of sensor and the accuracy of calculation formula, and its actual measurement accuracy is low. Based on portable multi-environmental parameter acquisition device, a set of air refractive index measurement system is designed to collect the information of temperature, humidity and atmospheric pressure in the environment. Error analysis of three indirect refractive index measurement formulas is carried out, and performance comparison with commercial environmental compensator is made. The experimental results show that under the experimental conditions of pressure 100.17~100.21kPa, temperature 21.1~21.9℃ and humidity 45.9~58.0% RH, the measurement error of the system is 2.69×10-7 lower than that of the commercial environmental compensator.
闵帅博,严利平,崔建军,王冬,束红林,陈恺. 高精度空气折射率测量系统设计与实现[J]. 计量学报, 2020, 41(11): 1332-1338.
MIN Shuai-bo,YAN Li-ping,CUI Jian-jun,WANG Dong,SHU Hong-lin,CHEN Kai. Design and Implementation of High Precision Air Refractive Index Measurement System. Acta Metrologica Sinica, 2020, 41(11): 1332-1338.
［1］王子轩, 冀聪, 王晶, 等. 利用透射式激光空气隙干涉的纳米分辨率精密位移测量研究 ［J］. 中国激光, 2019, 46 (9): 1-10.
Wang Z X, Ji C, Wang J, et al. Research on Precise Displacement Measurement with Nanoresolution Using Transmitted Laser Air Gap Interference ［J］. Chinese Journal of Lasers, 2019, 46 (9): 1-10.
［2］刘通, 张刘, 张冠宇, 等. 基于可变相位延迟的激光干涉式亚纳米级微位移测量系统 ［J］. 光谱学与光谱分析, 2019, 39 (2): 377-382.
Liu T, Zhang L, Zhang G Y, et al.Laser interferometric subnanometer microdisplacement measurement system based on variable phase delay ［J］. Spectroscopy and Spectral Analysis, 2019, 39 (2): 377-382.
［3］刘俊亨, 孙双华, 田明, 等. 基于激光干涉仪的位移传感器标定技术研究 ［J］. 计量学报, 2017, 38 (z1): 85-88.
Liu J H, Sun S H, Tian M, et al.Research on Calibration Technology of Displacement Sensor Based on Laser Inter-ferometer ［J］. Acta Metrologica Sinica, 2017, 38 (z1): 85-88.
［4］李东光, 张国雄. 用预抽气真空腔法测量及补偿空气折射率的研究 ［J］. 光学精密工程, 2001, 9 (1): 80-84.
Li D G, Zhang G X. Study on Measurement and Compensation of Air Refractive Index by Prepumped Vac-uum Cavity Method ［J］. Optics And Precision Engine-ering, 2001, 9 (1): 80-84.
［5］陈强华, 罗会甫, 王素梅, 等. 基于表面等离子体共振和双频激光干涉相位测量的空气折射率测量 ［J］. 中国激光, 2013, 40 (1): 180-186.
Chen Q H, Luo H P, Wang S M, et al. Measurement of Air Refractive Index Based on Surface Plasmon Resonance and Dual-Frequency Laser Interference Phase Measurem-ent ［J］. Chinese Journal of Lasers, 2013, 40 (1): 180-186.
［6］Yan L P, Chen B Y, Zhang E Z, et al. Precision mea-surement of refractive index of air based on laser synthe-ticwavelength interferometry with Edlén equation estima-tion ［J］. Review of Scientific Instruments, 2015, 86 (8): 085111.
［7］Yan L P, Chen Z Q, Chen B Y, et al. Precision PGC demodulation for homodyne interferometer modulated with a combined sinusoidal and triangular signal ［J］. Optics Express, 2018, 26 (4): 4818-4831.
［8］Chen B Y, Yang Y, Yan L P, et al. Precision measure-ment of the refractive index of air using a phase modulated homodyne interferometer with a variable length vacuum cavity ［J］. Measurement Science and Technology, 2019, 30 (7): 075010.
［9］Birch K P, Downs M J. An Updated Edlén Equation for the Refractive Index of Air［J］. Metrologia, 1993, 30 (3): 155-162.
［10］Bnsch G, Potulski E. Measurement of the refractive index of air and comparison with modified Edlén ［J］. Metrologia, 1998, 35 (2): 133-139.
［11］陈强华, 刘景海, 罗会甫, 等. 对633 nm波长下湿空气折射率计算公式的精确修正 ［J］. 中国激光, 2014, 41 (3): 157-161.
Chen Q H, Liu J H, Luo H F, et al. Accurate Correction of the Formula for Calculating the Refractive Index of Wet Air at 633nm Wavelength ［J］. Chinese Journal of Lasers, 2014, 41 (3): 157-161.
［12］陈杨, 李建双, 缪东晶, 等. 基于传感器阵列的野外基线环境参数自动测量系统研制 ［J］. 计量学报, 2018, 39 (4): 455-460.
Chen Y, Li J S, Miao D J, et al. Development of Field Baseline Environmental Parameters Automatic Measure-ment System Based on Sensor Array ［J］. Acta Metrologica Sinica, 2018, 39 (4): 455-460.
［13］崔建军, 刘香斌, 康岩辉, 等. 基于Edlén公式空气折射率测量系统的校准研究 ［J］. 计量学报, 2014, 35 (3): 210-215.
Cui J J, Liu X B, Kang Y H, et al. Calibration Researchof Air Refractive Index Measurement System Based on Edlén Formula ［J］. Acta Metrologica Sinica, 2014, 35 (3): 210-215.
［14］Wexler A. Vapor pressure formulation for water in range 0 to 100 ℃ A revision ［J］. Journal of Research of the National Bureau of Stardards. Section A: Physics and Chemistry, 1976, 80A (5): 775-785.
［15］Cooper J W. C#设计模式 ［M］. 张志华, 等译. 北京: 电子工业出版社, 2003.
［16］吴炳阳, 于晋龙, 王菊, 等. 小型化空气折射率测量装置的精度修正 ［J］. 激光与光电子学进展, 2018, 55 (4): 22-28.
Wu B Y, Yu J L, Wang J, et al. Accuracy Correction of Miniaturized Air Refractive Index Measuring Device ［J］. Laser & Optoelectronics Progress, 2018, 55 (4): 22-28.
2020, Vol. 41 
