1. Suzhou Institute of Metrology, Suzhou, Jiangsu 215126, China
2. National Institute of Metrology, Beijing 100029, China
3. Colloge of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang, 310018, China
Abstract：Aiming at the problem that the spatial resolution standard of X-ray coordinate measuring machine cannot be traced, the development and calibration method of the spatial resolution standard of X-ray coordinate measuring machine are studied.Firstly, based on the wire-to-card method, a regularly traceable grid standard is developed by lithography and inductively coupled plasma (ICP) etching.Secondly, the measurement traceability of the standard is realized by scanning electron microscope. The grid period of standard are 4~40μm, and the uniformity is up to 0.1%, which can meet the current metrological X-ray coordinate measuring machine spatial resolution traceability requirements. Finally, the detachable package protection structure is designed and prepared by 3D printing technology, which is convenient for the popularization and use of the standard in the industry. The above method is helpful to improve the calibration work of X-ray coordinate measuring machine and improve the accuracy level at present.
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2024, Vol. 45 
