1. School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui 230009, China
Abstract：Piezoelectric actuator has been widely used in precision positioning, micro/nano measurement fields. However, hysteresis and nonlinear phenomena seriously affect its positioning accuracy and performance. Although the charge driving method can reduce most of the hysteresis, there is still obvious residual hysteresis, especially when the voltage range is large, and the hysteresis of piezoelectric actuator shows an increasing trend. Based on the analysis and calculation of residual hysteresis, a method to improve the residual hysteresis of charge pump driving method is proposed, and the derivation method of correction parameters are studied, to improves the hysteresis nonlinearity of classical charge pump drive. Through experiments, it is found that in the case of a drive voltage range of 0~100V and a drive frequency of 0.1~2Hz, the improved charge pump drive method can further reduce the hysteresis to less than 0.47%, which is about 83% lower, compared with the classical charge pump drive method of hysteresis of 2.79%. The proposed method has good application value in precision measurement and other fields.
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2023, Vol. 44 
