一种在片薄膜铂电阻温度传感器的校准方法

doi:10.3969/j.issn.1000-1158.2022.12.13

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摘要在片薄膜铂电阻温度传感器以铂作为感温薄膜,采用半导体工艺制造,可以有效地监测晶圆片上的半导体器件温度。为了校准该类型温度传感器,根据其工作原理和结构特点,参考JJG 229-2010对校准装置的要求,提出了一种利用高低温探针台、八位半数字多用表以及直流探针组建校准装置的方法;通过组建校准装置,测量温度传感器在不同温度下的电阻值,得到电阻-温度特性的分度表;并对在片薄膜铂电阻温度传感器在25℃和 125℃2个温度点进行校准。校准数据及校准结果验证表明,该方法切实可行,可有效解决无连接引线的在片铂薄膜电阻温度传感器的校准问题。该校准技术也可为其他类型感温元件的在片温度传感器校准提供参考依据。

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	许晓青
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	吴爱华

关键词 ：计量学;温度传感器, 微传感器, 在片薄膜;高低温探针台, 校准方法

Abstract：In the on-wafer thin film temperature sensor, platinum is used as the temperature sensing film, and is manufactured by semiconductor technology, which can effectively monitor the temperature of semiconductor devices on-wafer. In order to calibrate this type of temperature sensor, according to its working principle and structural characteristics, referring to the requirements of JJG 229-2010 for calibration device, a method is presented to set up a calibration device which consists of high and low temperature probe station, 8 1/2 digital multimeter and direct current probe. The resistance values of the temperature sensor are measured at different temperatures, and a scale of resistance temperature characteristics is obtained. The on-wafer thin film platinum resistance temperature sensor is calibrated at two temperature points of 25 ℃ and 125 ℃. The verification of calibration data and calibration result shows that the proposed method is feasible and can effectively solve the calibration problem of on-wafer thin film platinum temperature sensor without connecting leads. This calibration technique also provides a reference for other types of on-wafer temperature sensors.

Key words： metrology temperature sensor microsensor on-wafer thin film high and low temperature probe table calibration method

收稿日期: 2021-11-19 发布日期: 2022-12-28

PACS:

TB942

基金资助:国防技术基础计量项目(JSJL2014210B006)

通讯作者: 吴爱华(1980-),男,河北张家口人,中国电子科技集团公司第十三研究所研究员级高工,主要从事无线电计量研究工作。Email: aihua.wu@139.com E-mail: aihua.wu@139.com

作者简介: 许晓青(1982-),女,河北石家庄人,中国电子科技集团公司第十三研究所高工,主要研究方向为热学计量。Email: xuxiaoqing@cets13.cn

引用本文:

许晓青,李锁印,刘晨,赵新宇,赵革艳,吴爱华. 一种在片薄膜铂电阻温度传感器的校准方法[J]. 计量学报, 2022, 43(12): 1605-1609.
XU Xiao-qing,LI Suo-yin,LIU Chen,ZHAO Xin-yu,ZHAO Ge-yan,WU Ai-hua. Calibration Method of On-Wafer Thin Film Platinum Resistance Temperature Sensor. Acta Metrologica Sinica, 2022, 43(12): 1605-1609.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2022.12.13 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2022/V43/I12/1605

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