Abstract：To realize the direct measurement of the diaphragm tension of condenser microphones, the X-ray diffraction technology is adopted to measure microphone diaphragm with different tension. Comparing with the calculated tension value of the electrostatic excitation resonance method, the results show that two methods had the same trend and good consistency about the tension of microphone diaphragm. The resonant frequency calculated by the microphone frequency response includes the influence of the back cavity of the condenser microphone. Therefore, its measured value is slightly higher than the resonant frequency of the diaphragm itself. Therefore, the measured result of the X-ray diffraction method is slightly lower than the tension value calculated according to the resonant frequency. Finally, the influence of diaphragm tension on the electroacoustic characteristics of condenser microphone is verified by a series of tests.
［1］马大猷,等.声学手册［M］.北京:科学技术出版社,2007.
［2］杜功焕,朱哲民,龚秀芬.声学基础［M］.南京:南京大学出版社,2001.
［3］Li X, Zhu H J, He L B, et al. Discussion on the Diaphragm Tension Measurement of Condenser Microphones［C］//International Institute of Acoustics and Vibration. The 27th International Congress on Sound and Vibration (ICSV27). Prague, the Czech Republic, 2021.
［4］Ganji B A, Majlis B Y. Condenser microphone performance simulation using equivalent circuit method［C］// IEEE. IEEE International Conference on Semiconductor Electronics. 2004.
［5］伍建文,潘学荣,芦丽莉,等.基于XRD的Inconel 690和321不锈钢异种金属焊接残余应力测试与分析［J］.无损检测,2018,40(10):49-52.
Wu J W, Pan X R, Lu L L, et al. Test and Analysis of Residual Stress in Welding with Inconel 690 and 321 Stainless Steel Based on XRD ［J］. Nondestructive Testing, 2018,40(10):49-52.
［6］高凯,蒋庆,孙建平,等. 铂丝位错特性对标准铂电阻温度计稳定性影响的研究［J］.计量学报,2020,41(11):1352-1357.
Gao K, Jiang Q, Sun J P, et al. Influence of Platinum Dislocation Characteristics on the Stability of Standard Platinum Resistance Thermometer［J］ Acta Metrologica Sinica, 2020,41(11):1352-1357.
［7］Gelfi M, Bontempi E, Roberti R, et al. X-ray diffraction Debye Ring Analysis for STress measurement (DRAST): a new method to evaluate residual stresses［J］. Acta Materialia, 2004, 52(3):583-589.
［8］JJF 175—2015 工作标准传声器(静电激励器法)［S］.
［9］Yan X, Crocker M J, Zeng L J. Measured capacitance of a condenser microphone as a function of diaphragm displacement［J］. Journal of the Acoustical Society of America, 2000, 108(5):2134.
［10］Hohm D, Gisela H. A subminiature condenser microphone with silicon nitride membrane and silicon back plate［J］. Journal of the Acoustical Society of America, 1989, 85(1): 476-480.
［11］李亚飞,陈智军,朱卫俊,等.基于频域相位信息的声表面波谐振器回波频率估计［J］.计量学报,2020,41(7):848-851.
Li Y F,Chen Z J,Zhu W J,et al. Echo Frequency Estimation of Surface Acoustic Wave Resonator Based on Phase Information in Frequency Domain［J］. Acta Metrologica Sinica, 2020,41(7):848-851.
［12］欧阳毅,郑虎鸣. 微小振幅的圆形振膜的受迫振动［J］. 电声技术,2004(1):7-8,11.
Ouyang Y, Zheng H M. Forced Vibration of Circular Membrane with Mini-amplititude［J］. Elementary Electroacoustic, 2004(1):7-8,11.
［13］陈红江,何龙标. 基于相关传声器比较法的传声器低频校准［J］. 计量学报,2013,34(4):383-386.
Chen H J, He L B. Low Frequency Microphone Calibration Based on the Ralated Microphone Method［J］. Acta Metrologica Sinica, 2013,34(4):383-386.
［14］Watakabe M, Mita K, Akataki K, et al. Mechanical behavior of condenser microphone in mechanomyography［J］. Medical and Biological Engineering and Computing: Journal of the International Federation for Medical and Biological Engineering,2001,39(2):195-201.
［15］GB/T 20441.4—2006 测量传声器 第4部分 工作标准传声器规范［S］.
［16］Takeuchi Y, Ogura H, Makihata K. Electretization Method of Condenser Microphone, Electretization Apparatus, And Manufacturing Method of Condenser Microphone Using It: US20090129612［P］. 2009.
［17］吴宗汉, 王丽, 李军.驻极体与驻极体传声器［M］.南京:东南大学出版社,2004.
2022, Vol. 43 
