1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang,Hebei 050051, China
2. Xidian University, Xi’an, Shaanxi 710071, China
Abstract：An enhanced SOLR(eSOLR) calibration method for solving the 8-term errors model in an on-wafer test system is introduced. The proposed new method requires one undefined Thru, two pairs of undefined symmetrical Reflects (Open-Open and Short-Short) and a pair of known Loads. 8-term error terms are derived in detail. Calibration comparison method was carried out between commercial calibration methods and eSOLR. The result showed that eSOLR was more accuracy than SOLT and LRRM. The calibration method has been tested on a mismatched attenuator for the frequency range between 0.2GHz and 110GHz. Compared with the existing calibration methods, the new method shows the attenuator’s S11 is more consecutive and S21 more closer to the Multiline TRL.
［1］Rytting D. Network analyzer error models and calibration methods ［M］. White Paper, Agilent Technologies: 1998.
［2］Ginley R A. Establishing traceability for SOLT calibration kits ［C］// 90th ARFTG Microwave Measurement Symposium (ARFTG). Boulder, CO, USA, 2017:1-4.
［3］Ferrero A, Pisani U. Two-Port Network Analyzer Calibration Using an unknown Thru ［J］. IEEE Micro and Gui Wave letters, 1992, 2 (12): 505-507.
［4］Walker D K, Williams D F. Comparison of SOLR and TRL calibrations ［C］// 59th ARFTG Conference Digest. Baltimore, MD, USA, 1998: 83-87.
［5］Basu S, Hayden L. An SOLR calibration for accurate measurement of orthogonal on-wafer duts ［J］. IEEE MTT-S Int Microw Symp Dig, 1997, 3: 1335-1338.
［6］Davidson A, Jones K, Strid E. LRM and LRRM calibrations with automatic determination of load inductance ［C］ // 36th ARFTG Conference Digest. Monterey, CA, USA, 1990: 57-63.
［7］Hayden L. An enhanced line-reflect-reflect-match calibration ［C］ // 67th ARFTG Conference Digest. San Francisco, CA, USA, 2006:143-149.
［8］Engen G F, Hoer C A. Thru-Reflect-Line: An improved technique for calibrating the dual six-port automatic network analyzer ［J］. IEEE Trans Microw Wave Theory Techn, 1979, 27 (12): 987-993.
［9］Morini A, Farina M. Generalized Thru-Reflect-Line Calibration Technique for the Measurement of Multimodal Radiating Waveguides ［J］. IEEE Antennas and Wireless Propagation Letters, 2017: 844-847.
［10］Williams D F, Walker D K. Series-resistor calibration ［C］ // 50th ARFTG Conference Digest. Portland, OR, USA, 1997: 131-137.
［11］Orloff N D, Mateu J, Lewandowski A, et al. Generalized Thru-Reflect-Line Calibration Technique for the Measurement of Multimodal Radiating Waveguides ［J］. IEEE Transactions on Microwave Theory and Techniques, 2011, 59 (1): 188-195.
［12］Marks R. A multiline method of network analyzer calibration ［J］. IEEE Transactions on Microwave Theory and Techniques, 1991, 39 (7): 1205-1215.
［13］Williams D F, Wang C M, Arz U. An optimal multiline TRL calibration algorithm ［C］ // 2003 IEEE MTT-S International Microwave Symposium Digest. Boulder, CO, USA, 2003:1819-1822.
［14］Williams D F, Wang C M, Arz U. An optimal multiline TRL calibration algorithm ［J］. IEEE Trans Microwave Theory and Technology, 2003, 51 (12): 2391-2401.
［15］Williams D F, Schmuckle F J, Doerner R. Crosstalk Corrections for Coplanar Waveguide Scattering Parameter Calibrations ［J］. IEEE Trans Microwave Theory and Technology, 2014, 62 (8): 1748-1761.
［16］Williams D F, Young A C, Urteaga M. A Prescription for Sub-Millimeter-Wave Transistor Characterization ［J］. IEEE Transactions On Terahertz and Technology, 2013, 3 (4): 433-439.
［17］Butler J V, Rytting D, Iskander M F, et al. 16-term error model and calibration procedure for on wafer network analysis measurements (MMICs) ［C］// 1991 IEEE MTT-S International Microwave Symposium Digest. Boston, MA, USA, 1991:1125-1127.
［18］Butler J V, Rytting D, Iskander M F, et al. 16-term error model and calibration procedure for on wafer network analysis measurements (MMICs) ［J］. IEEE Trans Microwave Theory and Technology, 1991, 39 (12): 2211-2217.
［19］Silvonen K, Dahlberg K, Kiuru T. 16-term Error Model in Reciprocal Systems ［J］. IEEE Trans Microwave Theory and Technology, 2012, 60 (11): 3551-3558.
［20］Dahlberg K, Silvonen K. A Method to Determine LRRM Calibration Standards in Measurement Configurations Affected by Leakage ［J］. IEEE Trans Microwave Theory and Technology, 2014, 62 (9): 2132-2139.
［21］Wu A H, Liu C, Liang F G, et al. Calibration on the Fly—A Novel Two-Port S-Parameter Measurement Method for On-Wafer Leaky Systems ［J］. IEEE Trans Microwave Theory and Technology, 2020, 68 (8): 3558-3564.
［22］Heiliger H M, Nagel M, Roskos H G, et al. Thin-film microstrip lines for mm and sub-mm-wave on-chip interconnects ［C］// 1997 IEEE MTT-S International Microwave Symposium Digest. Dever, CO, USA, 1997: 421-424.
［23］Wang Y B, Fu X C, Wu A H, et al. Development of gallium-arsenide-based GCPW calibration kits for on-wafer measurements in the W-band ［J］. International Journal of Microwave and Wireless Technologies, 2019, 12: 367-371.
［24］Williams D F, Marks R B. Transmission line capacitance measurement ［J］. IEEE Microwave and Guided Wave Letters, 1991: 243-245.
［25］王一帮, 吴爱华, 霍晔,等. 一种用于毫米波器件本征在片S参数校准的新方法 ［J］. 计量学报, 2022, 43 (3):293-298.
Wang Y B, Wu A H, Huo Y, et al. Development of A New Method for Millimeter-waveintrinsic On-wafer Measurements ［J］. Acta Metrologica Sinica, 2022,43 (3): 293-298.
［26］Marks R B, Williams D F. Characteristic impedance determination using propagation constant measurement ［J］. IEEE Microwave and Guided Wave Letters, 1991, 1 (6): 141-143.
［27］王一帮, 吴爱华, 刘晨,等. 一种对在片测量系统中串扰误差进行修正的新型校准方法 ［J］. 计量学报, 2021,42 (12): 1552-1557.
Wang Y B, Wu A H, Liu C, et al. A Novel Calibration Method at On-Wafer Measurement System Affected by Leakage ［J］. Acta Metrologica Sinica, 2021, 42 (12): 1552-1557.
［28］Williams D F, Marks R B, Davidson A. Comparison of on-wafer calibrations［C］// 38th Automatic Radio Frequency Techniques Group Conference Digest. San Diego, CA, USA, 1991: 68-81.
2022, Vol. 43 
