Research on Calibration Method of Initial Incident Angle of Metrological Laser Ellipsometer
LI Xiong-wei1,LI Qi2,JI Feng1,LI Shi2,LI Wei2,HUANG Lu2,SHI Yu-shu2,PI Lei2
1. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui 230009, China
2. National Institute of Metrology, Beijing 100029, China
Abstract：To ensure the accuracy of the measurement results of the metrology-type laser ellipsometer, an initial incidence angle calibration method is investigated, the incident laser optical axis of the ellipsometer is calibrated at 90° to the optical axis of the self-collimator by means of a linear displacement stage driving the CCD camera in one-dimensional motion, and its motion axis is used as a spatial linear auxiliary reference quantity. The results show that the initial incidence angle of the metrology-type laser ellipsometer is calibrated by this method, and the deviation of the optical axis pitch angle is less than 0.05° and the deviation of the deflection angle is less than 0.09°. The calibration results show that the calibration error of the SiO2 film thickness standard on Si with the nominal value of 102.10nm is less than 0.4nm. The research work has improved the accuracy of the measurement and calibration service of the metrology-type laser ellipsometer.
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2022, Vol. 43 
