微机电系统微摩擦测试技术研究

doi:10.3969/j.issn.1000-1158.2021.10.05

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摘要为解决微机电系统存在的微摩擦问题,提出了一种以光反射为基础的微摩擦测试技术。探讨了该测试方法的基本原理和实施步骤,设计研发了微机电系统的微摩擦测试样机,详细分析了该测试系统计量标定的完整过程,最终得到了该系统的计量测试数据及曲线。通过对Cu-Si、Al-Si表面进行微摩擦实验测试,得到了Cu-Si、Al-Si表面的μm量级微摩擦系数,有效验证了该测试系统能够满足微机电系统微摩擦测试的需要,同时,也为微机构运动特性的理解及设计提供了依据。

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	吴翠红
	于博
	赵晶
	刘效含
	吴欣宇

关键词 ：计量学, 微摩擦, 微机电系统, 测试技术, 光反射, 计量标定

Abstract：In order to solve the problem of micro-friction in micro-electro-mechanical systems(MEMS), a micro-friction test technology based on light reflection was proposed. The basic principles and implementation steps of the test method were discussed, the test prototype was developed, the complete process of measurement and calibration of the test system was analyzed in detail, and finally the measurement data and curve of the test system were obtained. Through the micro-friction experiment test on the Cu-Si and Al-Si surfaces, the micron-level micro-friction coefficients of the Cu-Si and Al-Si surfaces were obtained. It provides a basis for the understanding and design of the micro-mechanisms motion characteristics.

Key words： metrology micro-friction micro-electro-mechanical system test technology light reflection metrological calibration

收稿日期: 2020-10-20 发布日期: 2021-10-18

PACS:

TB931

基金资助:吉林省教育厅“十三五”科学技术项目(JJKH20191248KJ)

通讯作者: 于博(1987-),男,吉林长春人,长春工程学院机电学院讲师,博士,主要从事超精密加工与智能系统检测研究工作。Email:jd_yb@ccit.edu.cn E-mail: yubo745@163.com

作者简介: 吴翠红(1976-),女,吉林长春人,长春理工大学光电信息学院机电工程学院副教授,硕士,从事超精密加工与智能系统检测研究工作。Email: jd_wch@ccit.edu.cn

引用本文:

吴翠红,于博,赵晶,刘效含,吴欣宇. 微机电系统微摩擦测试技术研究[J]. 计量学报, 2021, 42(10): 1288-1293.
WU Cui-hong,YU Bo,ZHAO Jing,LIU Xiao-han,WU Xin-yu. Research on Micro Friction Testing Technology of Micro-electro-mechanical System. Acta Metrologica Sinica, 2021, 42(10): 1288-1293.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2021.10.05 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2021/V42/I10/1288

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