1. School of Instrumentation Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
2. National Institute of Metrology, Beijing 100029, China
3.Shanghai Tech University, Shanghai 201210, China
Abstract：Superconductivity transition edge sensors (TES) are single photon detectors which required for quantization of light intensity units, candela.The study of the physical properties of metal superconducting thin films is the basis of TES research. High purity Al and Ti superconducting nano films were prepared by magnetron sputtering with different power supplies. The growth rate of the films was analyzed as a function of pressure and power. The surface stress and electric properties of the films were measured by using surface stress meter and electrical measuring instrument.Finally, the films were tested inside a commercial dilution refrigerator to obtain its superconducting properties, especially the superconducting transition temperature Tc and the transition width ΔT which play an important role in TES energy resolution and time constant.The experimental results will lay the foundation for the fabrication of TES devices.
［1］宋明顺,方兴华,马爱文,等.论新国际单位制(SI)的“秒制”特征及其未来发展［J］. 计量学报, 2019, 40(4): 541-548.
Song M S, Fang X H, Ma A W,et al. The Characteristics of the New SI Base on “second system” and its Future Development［J］. Acta Metrologica Sinica, 2019, 40(4): 541-548.
［2］马爱文, 曲兴华.SI基本单位量子化重新定义及其意义［J］. 计量学报, 2020, 41(2): 129-133.
Ma A W, Qu X H. The Quantized Redefinition of the SI and its Signification［J］. Acta Metrologica Sinica, 2020, 41(2): 129-133.
［3］甘海勇, 刘慧, 林延东. 发光强度——坎德拉的演进［J］. 中国计量, 2018,(10): 24-27.
Gan H Y,Liu H,Lin Y D. Luminous intensity—the evolution of Candela［J］. China Metrology, 2018, (10): 24-27.
［4］Chunnilall C J, Degiovanni I P, Kück S, et al.Metrology of single-photon sources and detectors: a review［J］. Opt Eng, 2014,53(8): 081910.
［5］Avella A, Brida G, Degiovanni I P, et al. Self consistent, absolute calibration technique for photon number resolving detectors［J］. Opt Express, 2011, 19(23): 23249.
［6］Lita A E, Miller A J, Nam S W.Counting near-infrared single-photons with 95% efficiency［J］.Opt Express, 2008,16(5): 3032.
［7］Portesi C, Taralli E, Rocci R, et al. Fabrication of Au/Ti TESs for optical photon counting［J］. Low Temp Phys, 2008, 151(1-2 PART 1): 261-265.
［8］Shi S C, Zhang W, Li J, et al. A THz Superconducting Imaging Array Developed for the DATE5 Telescope［J］. Low Temp Phys, 2016,184(3-4): 754-758.
［9］Fukuda D, Fujii G, Numata T, et al. Titanium-based transition-edge photon number resolving detector with 98% detection efficiency with index-matched small-gap fiber coupling［J］. Opt Express, 2011,19(2): 870-874.
［10］Taralli E, Lolli L, Portesi C, et al. Reduced Active Area in Transition-Edge Sensors for Visible-NIR Photon Detection: A Comparison of Experimental Data and Two-Fluid Model［J］. IEEE Trans Appl Supercond, 2015,25(3): 1-4.
［11］Yan D K, Divan R, Gades L M, et al. Eliminating the non-Gaussian spectral response of X-ray absorbers for transition-edge sensors［J］. Appl Phys Lett, 2017,111(19): 1-4.
［12］Huang X G, Zhou J, Fu M, et al. Binary colloidal crystals with a wide range of size ratios via template-assisted electric-field-induced assembly［J］. Langmuir, 2007,23(17): 8695-8.
［13］Baracchini E, Betti M G, Biasotti M, et al. PTOLEMY: A Proposal for Thermal Relic Detection of Massive Neutrinos and Directional Detection of MeV Dark Matter［R］. Ithaca: Cornell University,2018.
［14］Alpert B, Balata M, Bennett D, et al. HOLMES: The electron capture decay of 163Ho to measure the electron neutrino mass with sub-eV sensitivity［J］. Eur Phys J C, 2015,75(3): 1-11.
［15］Lita A E, Calkins B, Pellochoud L A, et al. High-efficiency photon-number-resolving detectors based on hafnium transition-edge sensors［R］. Gaithersburg: NIST, 2009.
［16］Lolli L, Taralli E, Rajteri M, et al.Characterization of Optical Fast Transition-Edge Sensors With Optimized Fiber Coupling［J］. IEEE Trans Appl Supercond, 2013,23(3): 2100904.
［17］Portesi C, Taralli E, Lolli L, et al. Fabrication and Characterization of Fast TESs With Small Area for Single Photon Counting［J］. IEEE Trans Appl Supercond,2015,25(3): 1-4.
［18］Lolli L, Taralli E, Portesi C, et al. High intrinsic energy resolution photon number resolving detectors［J］. Appl Phys Lett ,2013,103(4): 041107.
［19］Meda A, Losero E, Samantaray N, et al. Photon-number correlation for quantum enhanced imaging and sensing［J］. J Opt, 2017,19(9): 094002.
2021, Vol. 42 
