TES用超导薄膜制备及特性研究

刘贤文; 徐骁龙; 李劲劲; 王雪深; 钟青; 曹文会; 白剑楠; 张硕; 刘想靓; 司坤宇; 周哲海; 甘海勇

doi:10.3969/j.issn.1000-1158.2021.02.09

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计量学报 ›› 2021, Vol. 42 ›› Issue (2) : 184-188. DOI: 10.3969/j.issn.1000-1158.2021.02.09

光学计量

TES用超导薄膜制备及特性研究

刘贤文¹,徐骁龙²,李劲劲²,王雪深²,钟青²,曹文会²,白剑楠¹,张硕³,刘想靓²,司坤宇¹,周哲海¹,甘海勇²

作者信息 +

Deposition and Characterization of Thin Films for Superconducting Transition Edge Sensor

LIU Xian-wen¹,XU Xiao-long²,LI Jin-jin²,WANG Xue-shen²,ZHONG Qing²,CAO Wen-hui²,BAI Jian-nan¹,ZHANG Shuo³,LIU Xiang-liang²,SI Kun-yu¹,ZHOU Zhe-hai¹,GAN Hai-yong²

Author information +

文章历史 +

摘要

超导转变边沿传感器(TES)是光强单位坎［德拉］量子化所需的单光子探测器,金属超导薄膜物理特性的研究是TES研究的基础。采用不同电源功率磁控溅射制备高纯Al、Ti超导纳米薄膜,分析其薄膜生长速率随气压和功率的变化。利用表面应力仪及电学测量仪,分析薄膜表面应力及电学特征。最后将薄膜放入商用稀释制冷机中,进行超低温测试,获得其超导特性。研究发现超导转变温度Tc以及转变沿宽度ΔT是影响TES能量分辨率以及时间常数的重要参数。实验结果将为TES器件的制备奠定基础。

Abstract

Superconductivity transition edge sensors (TES) are single photon detectors which required for quantization of light intensity units, candela.The study of the physical properties of metal superconducting thin films is the basis of TES research. High purity Al and Ti superconducting nano films were prepared by magnetron sputtering with different power supplies. The growth rate of the films was analyzed as a function of pressure and power. The surface stress and electric properties of the films were measured by using surface stress meter and electrical measuring instrument.Finally, the films were tested inside a commercial dilution refrigerator to obtain its superconducting properties, especially the superconducting transition temperature Tc and the transition width ΔT which play an important role in TES energy resolution and time constant.The experimental results will lay the foundation for the fabrication of TES devices.

导出引用

刘贤文,徐骁龙,李劲劲,王雪深,钟青,曹文会,白剑楠,张硕,刘想靓,司坤宇,周哲海,甘海勇. TES用超导薄膜制备及特性研究[J]. 计量学报. 2021, 42(2): 184-188 https://doi.org/10.3969/j.issn.1000-1158.2021.02.09

LIU Xian-wen,XU Xiao-long,LI Jin-jin,WANG Xue-shen,ZHONG Qing,CAO Wen-hui,BAI Jian-nan,ZHANG Shuo,LIU Xiang-liang,SI Kun-yu,ZHOU Zhe-hai,GAN Hai-yong. Deposition and Characterization of Thin Films for Superconducting Transition Edge Sensor[J]. Acta Metrologica Sinica. 2021, 42(2): 184-188 https://doi.org/10.3969/j.issn.1000-1158.2021.02.09

中图分类号： TB96

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