压头曲率半径对硬质薄膜结合力划痕测量影响的比较研究

doi:10.3969/j.issn.1000-1158.2020.09.09

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摘要硬质薄膜的膜/基结合力是表征材料可靠性的重要特性参数。采用划痕法测试硬质薄膜的结合力时,有很多因素会影响到临界载荷Lc的判定,例如薄膜和基底的硬度、模量,薄膜的表面粗糙度等;此外,仪器机架刚度、划痕速率、压头的曲率半径等仪器的测量参数也会影响临界载荷Lc的判定。采用划痕测量法,研究了曲率半径为20μm,50μm和100μm的压头对单晶硅和304基底的亚微米类金刚石薄膜与基底的结合力测量的影响。研究结果显示:随着压头曲率半径的增加,2种材料的临界载荷也随之增大。

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	于杰
	陶兴付
	秦林
	李晓兵

关键词 ：计量学, 压头曲率半径, 类金刚石薄膜, 膜/基结合力, 划痕法

Abstract：The film/base bonding force is an important characteristic parameter of the hard film materials. In the adhesion test of the hard film by the scratch method, there are many factors that affect the determination of the critical load Lc, such as the hardness & modulus of the film and the substrate, the surface roughness of the film, and so on. In addition, the test parameters including the instrument stiffness, the scratch rate, the radius of curvature of the indenter, etc., also affect the determination of the critical load Lc. The effects of three indenters with different radius of curvature (20μm, 50μm and 100μm) on the adhesion test of diamond-like carbon films with thickness of submicron were studied. Two differents substrate (i.e. single crystal silicon and 304 steel) were considered. The critical load of the two materials increases, as the increase of the radius of curvature of the tip.

Key words： metrology radius of curvature of indenter diamond-like carbon film film/base bonding force scratch method

收稿日期: 2019-01-11 发布日期: 2020-08-28

PACS:

TB93

基金资助:国家重点研发计划(2016YFF0204305)“石墨烯等碳基纳米材料 NQI 技术研究、集成与应用”项目之“非晶碳基纳米多层结构硬质薄膜 NQI 技术集成及应用示范”课题

作者简介: 于杰(1992-), 男, 山西昔阳人, 太原理工大学在读硕士研究生, 主要研究方向为薄膜材料微纳米力学特性测量。Email: 806748545@qq.com

引用本文:

于杰,陶兴付,秦林,李晓兵. 压头曲率半径对硬质薄膜结合力划痕测量影响的比较研究[J]. 计量学报, 2020, 41(9): 1089-1094.
YU Jie,TAO Xing-fu,QIN Lin,LI Xiao-bing. Comparative Study on the Influence of Curvature Radius of Needle Tip on Scratch Test of Hard Film Bonding Force. Acta Metrologica Sinica, 2020, 41(9): 1089-1094.

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