Performance Analysis and Optimization of Microgram Monomer Weighing Mechanism Based on Elliptical Flexure Hinge
ZHU Jinhui1,WANG Jian2,JIANG Wensong1,LUO Zai1
1. College of Metrology & Measurement Engineering, China Jiliang University,Hangzhou,Zhejiang 310018,China
2. National Institute of Metrology,Beijing 100029,China
Abstract：To improve the sensitivity of single weighing mechanism, the performance of microgram monomer weighing mechanism was analyzed and optimized, and the mathematical model of the weighing mechanism based on elliptical flexure hinge was established. The sensitivity of the weighing mechanism was evaluated by the end displacement of the beam of the weighing mechanism. The influence of elliptical and circular hinge on the sensitivity of the weighing mechanism was verified by changing the hinge thickness in different parts. The accuracy of the model was verified with Ansys Workbench finite element simulation software, and the evaluation basis for the mesh division of flexible hinges was given. The results show that the minimum error of the model is 1.8%, and under 1μg load, the end displacement of elliptical hinge increases by 0.39nm compared with circular hinge.
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2024, Vol. 45 
