Design of Optical Resonant Cavities for Inductive Type Optical Superconducting Transition Edge Detector Devices
WANG Zhen-yu1,ZHONG Qing2,ZENG Jiu-sun1,LI Jin-jin2,XU Xiao-long2,WANG Xue-shen2
1. College of Metrology and Measurement Engineering , China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 102200, China
Abstract：To improve the detection efficiency of the inductive optical superconducting transition edge detector devices, a resonant cavity structure based on an Al total reflection layer, SiO2 and SiNx anti-reflection layer is designed and fabricated on a 15nm niobium (Nb) film photon absorber layer for the 633nm wavelength. The reflectivity is simulated with the Concise Macleod software and the layer structure of the resonant cavity for the lowest reflectivity is selected. The resonant cavity is prepared by a magnetron sputtering process and a following chemical vapor deposition process with an end point detection. The reflectivity is characterized by a spectrophotometer, which shows that the prepared resonant cavity can reduce the reflectivity at 633nm to be only 0.9%, and also has good anti reflection effect, the reflectivity for from 506nm to 690nm to be <1%.
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2023, Vol. 44 
