Abstract：In order to solve the problem of inaccurate test results caused by deviation of parameter values after long time use of on-wafer calibration standards. Aiming at the equivalent circuit model of on-wafer calibration standards, a parameter determination method is proposed. The values of characteristic impedance, open capacitance, short inductance, load resistance and inductance, thru delay and loss are determined by measuring the s-parameters, length, and resistance of the on-wafer calibration standards. The test analysis is carried out with defined on-wafer calibration standards in the frequency range of 100MHz~67GHz. The results show that the test results of the on-wafer calibration standards after re-setting are closer to the actual values of the DUT than the factory values.
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