Abstract：Based on the surface roughness measurement device of NIM, researches on the visual positioning system, automatic operating system and multi-degree-of-freedom displacement system have been carried out, so as to realize the automatic measurement in accordance with the procedures specified in the international comparison agreement.Through experimental verification, the system can effectively realize the automatic measurement of surface roughness and meet the requirements of international comparison.In the measurement experiment on the surface roughness standard specified by the international comparison, the repeatability of the automatic positioning measurement of the system is 4.2nm, which is 2.6 times higher than the manual positioning measurement, and can effectively reduce the introduction of human error in the measurement process.
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2022, Vol. 43 
