1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,
China
2. Chengdu Kaipu Electronic Technology Co., Ltd, Chengdu, Sichuan 610041, China
Abstract：Micro capacitance measuring instrument in fF level has an important role in Military electronic products.In order to solve the no traceability problem of micro capacitance measuring instrument at 500fF/1MHz, a high frequency 500fF standard capacitor encapsulated with inert gas was manufactured as transfer standard.A measurement model of micro capacitance with high frequency was established, and the distributed parameter was estimated using “subjunctive” method.In the end, the uncertainty of a traceability method called “theoretical deduction” achieves 0.15%.Using three micro capacitance measuring instruments in the same level, the uncertainty of a traceability method called “measurement comparison” achieves 0.07%.The two kinds of traceability methods were used to calculate the same instrument, and the test results showed the same effect, which can satisfy users requirements.The above two traceability methods give an effective way for micro capacitance measurement in high frequency with lower capacitance.
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2022, Vol. 43 
