微纳米三坐标测量机三轴垂直度误差测量及建模补偿

doi:10.3969/j.issn.1000-1158.2022.04.03

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摘要垂直度误差是微纳米三坐标测量机的重要误差源之一,必须对其进行高精度测量并建立垂直度误差的补偿模型。采用基于光电位置敏感器件(PSD)的测量装置,先将三轴垂直度误差转化成相应方向的直线度误差再对其进行测量,并对微纳米三坐标测量机的垂直度误差进行建模和补偿。通过对0级标准量块厚度进行测量和垂直度误差补偿,量块X、Y方向厚度测量误差分别减小了11μm和4μm,验证了垂直度误差测量方法和补偿模型的有效性。

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	李瑞君
	李洁
	何亚雄
	程真英
	黄强先

关键词 ：计量学, 微纳米三坐标测量机, 垂直度误差, 建模补偿

Abstract：The perpendicularity error is one of an important error sources of micro-nano coordinate measuring machines (CMMs). This error should be measured with high accuracy and compensated by an effective model. The measurement setup based on PSD was used to measure the straightness errors which can be transformed into the perpendicularity errors of the micro-nano CMM. A model for perpendicularity errors of the micro-nano CMM was built and used to compensate the errors. Several 0-class gauge blocks were measured and the measuring errors in X and Y directions of the blocks were reduced by 11μm and 5μm respectively after the compensation. The correctness of the perpendicularity error measuring method and the effectiveness of the compensation model were validated.

Key words： metrology micro-nano CMM perpendicularity error modeling compensation

收稿日期: 2021-04-22 发布日期: 2022-04-08

PACS:

TB92

基金资助:国家重点研发计划项目(2019YFB2004900)

作者简介: 李瑞君(1976-),男,内蒙古和林格尔人,合肥工业大学教授、博士生导师,从事微纳测量技术与系统、光电检测技术与系统及精密控制技术与系统研究工作。Email: rj-li@hfut.edu.cn

引用本文:

李瑞君,李洁,何亚雄,程真英,黄强先. 微纳米三坐标测量机三轴垂直度误差测量及建模补偿[J]. 计量学报, 2022, 43(4): 452-456.
LI Rui-jun,LI Jie,HE Ya-xiong,CHENG Zhen-ying,HUANG Qiang-xian. Error Measurement and Modeling Compensation of Three Axis Perpendicularity of Micro-nano CMM. Acta Metrologica Sinica, 2022, 43(4): 452-456.

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