用于双探针原子力显微镜的定位平台的设计及实验验证

doi:10.3969/j.issn.1000-1158.2020.11.02

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摘要针对双探针原子力显微镜的需求,设计了一种提供精确位移的大行程定位平台。采用柔性铰链和压电陶瓷致动器分别作为定位平台的导向机构和驱动机构。在 X、Y和Z轴运动方向通过并联机构实现独立位移。对定位平台进行数学建模,分析和计算定位平台的工作刚度和固有频率,并进行了有限元仿真分析。以电容传感器作为位移测量单元构建了定位平台实验装置,并进行了实验验证。实验结果表明:定位平台在X与Y轴方向上拥有 110μm 的行程,分辨率为5nm,在Z轴方向上拥有45μm的行程,分辨率为5nm。

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	林之东
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	黄鹭
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关键词 ：计量学;双探针;原子力显微镜;定位平台, 分辨率, 柔性铰链

Abstract：A large-stroke positioning platform that provides precise displacement is designed for the needs of dual-probe atomic force microscopy. A flexible hinge and a piezoelectric actuator are respectively used as a guiding mechanism and a driving mechanism of the positioning platform. The X,Y,and Z axis motion directions are independently displaced by a parallel mechanism. Mathematical modeling of the positioning platform,analysis and calculation of the working stiffness and natural frequency of the positioning platform,and finite element simulation analysis. Mathematical modeling of the positioning platform is carried out, the working stiffness and natural frequency of the positioning platform are analyzed and calculated, and the finite element simulation analysis is carried out. The experimental devices of the positioning platform are constructed with the capacitive sensor as the displacement measuring unit,and the experimental verification is carried out. Experimental results show that the positioning platform has a travel distance of 110μm in the X and Y axis directions with a resolution of 5nm,and a travel distance of 45μm in the Z axis direction with a resolution of 5nm.

Key words： metrology double-probe atomic force microscope positioning platform;resolution;flexible hinge

收稿日期: 2019-10-23 发布日期: 2020-11-02

PACS:

TB92

基金资助:国家重点研发计划(2016YFF0200602)

通讯作者: 高思田(1962-),男,天津人,中国计量科学研究院研究员,从事纳米计量、材料计量、几何量计量研究。Email:gaost@nim.ac.cn E-mail: gaost@nim.ac.cn

作者简介: 林之东(1994-),男,浙江台州人,浙江理工大学研究生,研究方向为柔性定位平台。Email:linzhidong1995@163.com

引用本文:

林之东,高思田,黄鹭,李琪. 用于双探针原子力显微镜的定位平台的设计及实验验证[J]. 计量学报, 2020, 41(11): 1321-1326.
LIN Zhi-dong,GAO Si-tian,HUANG Lu,LI Qi. Design and Experimental Verification of Positioning Platform for Double-probe Atomic Force Microscopy. Acta Metrologica Sinica, 2020, 41(11): 1321-1326.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2020.11.02 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2020/V41/I11/1321

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