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2024 Vol. 45, No. 3
Published: 2024-03-28
305
Fabrication and Quality Evaluation of 2~10μm Step Height Reference Material Candidates
LIU Di,WANG Chenying,ZHANG Yaxin,WANG Yunxiang,WANG Song,CHEN Luntao,WANG Yonglu,ZHU Nan,JIANG Zhuangde
DOI: 10.3969/j.issn.1000-1158.2024.03.01
The micrometer step height reference materials can used to calibrate the z-axis performance of the instrument and transmit accurate micrometer height values. The step height reference material candidates with 2,5,10μm nominal size are prepared by photolithography combined with dry etching. The height, roughness, and parallelism of the steps are characterized. Using a laser confocal microscope and an aspheric measuring instrument for measurement, the step height is evaluated based on the bilateral algorithm, histogram method, International Organization for Standardization (ISO algorithm, and the decoupling criterion for optical microscopy (LEL) method. For the same reference material candidates, the standard deviation between each evaluation method does not exceed 0.024μm. Moreover, the relative deviation of the step height evaluation values is within 5%. This indicates that the evaluation results obtained using different algorithms and instruments have a high level of consistency and reliable measurement values. The comparison of evaluation results from different instruments indicates that the evaluation methods also have good consistency. Meanwhile, the roughness does not exceed 0.04μm. The parallelism of the upper and lower surfaces does not exceed 0.03°, which verifies the good preparation effect of the reference material candidates.
2024 Vol. 45 (3): 305-310 [
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242
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311
Inter-satellite Laser Interferometry Simulation System forGravitational Wave Detection
MU Henglin,LI Yan
DOI: 10.3969/j.issn.1000-1158.2024.03.02
The inter-satellite laser interferometers have a longer interference arm (10
6
km) than the ground interferometer and can detect gravitational waves in lower frequency bands 0.1mHz~1Hz. The inter-satellite laser interferometer has a typical structure of a transponder-type heterodyne interferometer, and its essence is an optical phase-locked loop. The simulated inter-satellite laser interferometer is built on the ground, and the frequency of the slave laser is successfully locked to the frequency of the stabilized master laser. The results show that the locking time is more than 2×10
4
s, which meets the detection requirement of low-frequency signals. The interferometer has no coarse errors under different conditions of shorter and longer displacements. The noise caused by environmental disturbances such as temperature and air pressure is the key factor that restricts the accuracy of the interferometer.
2024 Vol. 45 (3): 311-317 [
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172
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318
Design and Control of a New Long-Stroke Vertical Nano-Motion Stage
ZHANG Fan,HUANG Qiangxian,CHENG Rongjun,ZHANG Liansheng,LI Hongli,LI Ruijun
DOI: 10.3969/j.issn.1000-1158.2024.03.03
The design and stable control of the stage are key factors in large stroke high-precision vertical motion.Therefore,a novel motion stage with a balancing mechanism is proposed to achieve large stroke nano stable motion in the vertical direction.The characteristics of the stage are that the N331 piezoelectric linear motor is independently driven,suspended through the air static guide rail,and the Z-axis balance system is designed to reduce the motor driving load.A stepping mode is used to realize the large travel actuation,and an analog mode is adopted to implement micro-displacement actuation.This strategy can be used to achieve fast and precise driving of 100mm.In addition,the Z-stage can achieve compound control of the nanostepping and analog modes.The positioning fluctuation can be limited to±9nm within the full range of 100mm.According to the verification experiments,the stage can be suitable for driving and control tasks in coordinate measuring machines (CMMs),microlithography,and micromachining applications.
2024 Vol. 45 (3): 318-324 [
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114
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325
Mechanism and Identification Method of Distortion Caused by the Geometry Characteristic of Probe in Contact Surface Topography Measuring Instrument
WANG Kang,PI Lei,ZHANG Shu,ZHANG Shihan,SHI Yushu
DOI: 10.3969/j.issn.1000-1158.2024.03.04
Contact surface topography measuring instruments are commonly utilized for assessing variables such as surface roughness, geometric shapes, and waviness. Nevertheless, the convolution effect produced by the probe’s interaction with the test surface can result in measurement distortion. An analysis is performed on the distortion mechanism influenced by the geometric characteristics of the probe, classifying distortions based on their properties into conventional and complex distortions. In response to the distortion phenomena caused by the compound effects of a spherical probe tip and cone angles, a multimodal recognition method for complex distortion is proposed. Experimental outcomes indicate that compared to the limitations of single-mode recognition of conventional distortions by the topography measuring instrument, the proposed method could effectively identify complex distortions present in topography measurement results. Moreover, it offers a credible interpretation of the measurement results, providing a novel strategy for the accurate identification and correction of distorted data within these results.
2024 Vol. 45 (3): 325-331 [
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106
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332
Drift Error Prediction of Laser Interferometer Based on Bayesian Dynamic Model
LIU Liying,CHENG Zhenying,CHEN Xu,LI Ruijun
DOI: 10.3969/j.issn.1000-1158.2024.03.05
Aiming at the drift problem of laser interferometer during long time measurement,a drift error prediction method based on Bayesian dynamic model is proposed.By collecting the drift error sequence of the non-measurement stage,the data characteristics are analyzed and a Bayesian dynamic model is established.Then,the initial information required for recursion is obtained by using the non-information prior distribution method,and the state parameters of the model are trained and estimated by the Bayesian recursive algorithm.Finally,the drift error prediction effect has been verified by experiments based on the Michelson laser interferometer made in the laboratory.The results show that the mean square error of the compensated residual drift error is reduced by 67.85% and 99.08%,respectively,compared with the usual least squares fitting method and neural network modeling method.According to the prediction results of repeated experiments,the mean square error of residual drift error is reduced by more than 82% compared with that before compensation.The validity and robustness of the proposed drift error prediction method based on Bayesian dynamic model are verified.
2024 Vol. 45 (3): 332-339 [
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102
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340
Development of a Small Laser Tracking and Measuring System
GU Chaowei,MIAO Dongjing,YAN Liping,LIU Yang,LI Jianshuang
DOI: 10.3969/j.issn.1000-1158.2024.03.06
In order to realize coordinate tracking and measuring in large size range, a small laser tracking and measuring system with small volume and light weight is developed. The mechanical structure of opto-mechatronics is designed. The optical module, mechanical structure and electronic control module are integrated to reduce the volume of the system and improve the anti-interference ability. The optical module of the system is designed, and the maximum allowable deviation of the target is increased by optimizing the optical path of the acquisition part of the target deviation based on the position sensitive detector. Through the calibration experiment of position sensitive detector, the linear interval and deviation ratio coefficient of position sensitive detector are measured, which provides key parameters for the development of tracking control algorithm. The tracking control module is designed, and the tracking control algorithm is developed to realize the fast tracking measurement of the system. The 3D visual measurement software of the system is developed to realize the real-time control of the spatial position and motion state of the system and the target. The experimental results show that the tracking stability and displacement resolution of the system are 20μm and 40μm respectively, the tracking speed of the system can reach up to 480mm/s, the acceleration can reach up to 506mm/s
2
, the tracking range is no less than 70m, and the system has 3D coordinate measurement and 3D visualization functions. At the same time, compared with the existing tracker, it has the advantages in volume, weight and angle measurement range, and has good tracking performance and application prospects.
2024 Vol. 45 (3): 340-348 [
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85
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349
Dynamic Calibration Device Based on Synchronous Measurement of Laser Interferometer
REN Yu,HU Xiaolei,GUO Zhimin,FU Yunxia,ZHANG Feng
DOI: 10.3969/j.issn.1000-1158.2024.03.07
To realize the instantaneous dynamic test of time-varying geometry, a dynamic calibration device based on synchronous measurement of laser interferometer was developed. The device used linear motion rail as motion generator, laser interferometer as length standard, synchronous trigger based on GNSS tame clock to measure synchronously and ensure accurate and stable time, and dynamic calibration software to achieve control integration. By comprehensively analyzing the factors such as length measurement and time delay, the measurement uncertainty of the length indication of the device was Q[1.8μm, 3×10
-7
L](k=2). Two experiments proved the rationality of uncertainty evaluation and the feasibility of the device in the instantaneous dynamic accuracy test of laser tracker.
2024 Vol. 45 (3): 349-355 [
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90
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356
Chaotic Motion and Control Algorithm Analysis of AFM-TM Microcantilever System
SONG Peijie,CHU Yandong,ZHANG Hang,YU Rui
DOI: 10.3969/j.issn.1000-1158.2024.03.08
To address the issue of measurement accuracy in atomic force microscope in tapping mode (AFM-TM ) caused by the chaotic motion of the AFM-TM cantilever beam system, this study focused on analyzing the dynamic characteristics and control algorithm of the system. Through numerical simulation, the Lyapunov index, bifurcation diagram, Poincaré cross section, and phase diagram were used to analyze the evolution of the motion characteristics of AFM-TM microcantilever beam system when the external excitation amplitude changes. The delayed feedback control and fuzzy adaptive delayed feedback were proposed to control the chaotic motion of the system. Finally, the two control algorithms were compared. The results showed that the system exhibited obvious chaotic motion characteristics when the dimensionless external excitation amplitude was within the range of values such as [0.65,0.85]. Both the time-delay feedback control and the fuzzy adaptive time-delay feedback control could effectively pull the chaotic motion of the system back to the periodic orbit, but the fuzzy adaptive time-delay feedback was more suitable for the complex situation of the change of the AFM-TM sample. The research results provide a significant theoretical reference for selecting external excitation parameters of AFM-TM microcantilever beams, analyzing complex dynamic characteristics of nonlinear systems and controlling chaotic motion.
2024 Vol. 45 (3): 356-363 [
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133
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364
Pose Estimation Method Based on Improved ArUco Tags
DUAN Zhiyu,LUO Zai,JANG Wensong,YANG Li,LI Yaru,BIAN Dian
DOI: 10.3969/j.issn.1000-1158.2024.03.09
Aiming at the problem of low accuracy when using ArUco tags for long-distance measurement, an improved pose estimation method is proposed. The method designs array feature rings based on ArUco tags, the center points of the rings are extractd and sortd, and the accuracy of circle center detection are judged based on the cross-ratio invariant characteristics. The weighted least squares method is used to establish a straight line fitting relationship between the corner points of the ArUco tag and the center of the array rings to achieve corner point correction. The EPnP algorithm is used to calculate the pose parameters of the improved ArUco tag, and the LM algorithm is used to optimize the pose and improve the pose measurement accuracy. A robotic arm visual positioning system is designed to verify the feasibility and effectiveness of the proposed method. Experimental results show that the maximum translation error measured by this method in the range of 2.5~4m is 8.72mm, and the maximum rotation error is 1.78°, and the maximum rotation error is 4.65°. The proposed method reduces the relative error of longitudinal distance measurement by 0.69% at 4m, improving the measurement accuracy.
2024 Vol. 45 (3): 364-371 [
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118
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372
Research on Measurement Comparison of Standard Steel Tape
JIANG Yuanlin,KANG Yao,LI Lianfu,LI Jianshuang
DOI: 10.3969/j.issn.1000-1158.2024.03.10
The standard steel tapes is the third grade line standards in the verification scheme of line measuring instruments, and used for calibrating the tape-shaped working line measures. and used for transmitting the measurement values of a large number of steel tape measures and other strip work linear measuring instruments in China.In order to ensure the consistency of measurement values of standard steel tape, and scientific evaluation of Calibration and Measurement Capabilities (CMC) of standard steel tape in China, National Institute of Metrology as pilot laboratory organized the first national measurement comparison of standard steel tape. The basic situation, scheme, and comparison results of comparison was introduced, the comparison results and reference devices were analyzed, the key technical problems and main error sources in the calibration of standard steel tape were studied, and solutions to promote the improvement of the calibration ability of standard steel tape measurement values were proposed.
2024 Vol. 45 (3): 372-378 [
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95
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379
Curve Symmetry Center Fitting Algorithm Based on Symmetry Evaluation
ZHANG Xin,LIU Haibo,XIA Yuguo
DOI: 10.3969/j.issn.1000-1158.2024.03.11
It is one of the key problems in machine vision measurement to estimate the center position of noisy 1-dimensional images (grayscale curves) lacking shape prior information. With matching error between the curve and its mirror image being used as the symmetry evaluation function, a symmetry center fitting algorithm is proposed. And the and the least square method is used to calculate the best matching point as the symmetry center. The algorithm needs iterative calculation, and may converge to wrong position. By analyzing the possible local convergence caused by the initial value selection of iterative, it is proved that the local extreme point may only appear within the half pixels adjacent to the true value, a convergence point verification strategy is proposed, which solves the problem of erroneous convergence. The robustness of the algorithm under various disturbances is confirmed through simulation and real image verification. Under the interference of strong noise, the position variation of gray centroid method can reach tens or even hundreds of pixels, while the root-mean-square value of the position variation of symmetric centroid fitting algorithm can still remain at about 1 pixel. Under other noise conditions, the performance of symmetric centroid fitting algorithm is also far superior to gray centroid method.
2024 Vol. 45 (3): 379-385 [
Abstract
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97
)
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386
Optimization of Meteorological Correction Formula of Total Station
LIU Xiaodong,MIAO Dongjing,YAO Yan,WANG Changyun,WANG Deli,LI Lianfu,LIU Yang,CAI Jinhui,LI Jianshuang
DOI: 10.3969/j.issn.1000-1158.2024.03.12
To improve the long-distance distance measurement accuracy of the total station, an optimization method for the meteorological correction formula of the total station is proposed. After analyzing the meteorological correction formula, it was found that there is some error and there is room for optimization. In order to reduce the residual error caused by the correction formula and minimize the sum of residual errors as the optimization objective, the adjustment of meteorological formula coefficients is transformed into an optimization problem. By utilizing a dense array of environmental parameter sensors deployed on the long baseline in the field, real-time recording of environmental parameters during long-term continuous ranging of the total station is carried out for easy retrieval; Using ranging data to construct optimization functions, different combinations of meteorological transformation formula coefficients are optimized, adjusted and validated. The experimental data analysis results show that after optimization, the mean ranging error can be reduced by 99.8%, and the standard deviation of error can be reduced by 81.2%; To verify the effectiveness of the proposed method, the optimized coefficient correction formula is applied to distance compensation in other measurement time periods. The results show that the residual error is also effectively reduced, with an optimization amplitude of over 37%. The optimization of meteorological correction formula coefficients is an effective method to significantly reduce field ranging errors.
2024 Vol. 45 (3): 386-394 [
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77
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395
Research on Digital Measurement Technology of Heat Exchanger Fin Geometric Parameters and Its Application in Intelligent Manufacturing System
KAN Kan,XIONG Xingchuang
DOI: 10.3969/j.issn.1000-1158.2024.03.13
For solving the problem of digitized measurement of heat exchanger fin opening angle, a fin geometry parameter measurement device for heat exchanger intelligent manufacturing system is developed. The laser profiler is used for non-contact measurement, firstly, the raw profile datas are pre-processed by data elimination and taking the mean value, then the processed data are derived point by point to identify the measurement area of interest, and the least squares fitting algorithm is carried out by fixed length point by point stepping in each area of interest, and the optimal fitting line segment is selected for the calculation of the angle, so that the measurement of eight opening angles and three lengths of the fins can be realized automatically. JSON-based data interaction format is designed to realize the data communication with the manufacturing execution system. The experimental results show that the maximum permissible error (MPE) of the device angle measurement is ±0.5°, it has digital measurement and data interaction capabilities, and the measurement accuracy meets the quality control needs of enterprises.
2024 Vol. 45 (3): 395-401 [
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118
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402
Design and Implementation of Surface Scratch MeasurementDevice Based on Embedded System
LI Yan,JIA Zhiting,QU Jiansu,MA Xiaosu,WANG Ji
DOI: 10.3969/j.issn.1000-1158.2024.03.14
To measure the depth and width of scratches on surfaces such as aircraft fuselage skin and cabin glass, a scratch measurement device based on an embedded system has been developed. The device is designed based on the principle of light-section, using an embedded ARM development board, connecting an camera and an microscope. The camera collects images of parallel light strips projected by the projection module modulated by the measured surface. After image processing and scratch feature extraction, the depth and width of scratches are calculated, and the results can be digitized and saved. The experimental results show that the indication error of the device within the measurement range of 0.005~0.060mm does not exceed ± 2.0μm. The relative indication error within the measurement range of 0.060~2.000mm is less than ±4%. The device is miniaturized, integrated, high-precision, fast, and easy to operate, which is suitable for measuring scratches on various parts of the aircraft on-site.
2024 Vol. 45 (3): 402-411 [
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90
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412
Spectral Confocal Sensor Multi-Parameter High-Accuracy Calibration
YANG Pinhong,TANG Bo,CUI Jianjun,CHEN Kai,SONG Peijie,PENG Lu
DOI: 10.3969/j.issn.1000-1158.2024.03.15
Aiming at the problem of lack of calibration device and method for high accuracy spectral confocal sensor, a calibration method based on laser interferometry is proposed and the corresponding calibration device is developed. On the one hand, a wavelength multiples interval measurement method is proposed, by displacement feedback control, the displacement interval is set as an integer multiple of the laser wavelength, so as to reduce the influence of nonlinear error of laser interferometer on measurement. On the other hand, the measuring point correction algorithm is proposed to eliminate the influence of the displacement standard value on the measurement due to the limitation of the positioning accuracy of the calibration device. Experimental results demonstrate that within the measurement range of 0~100μm, the indication error is ±23nm, repeatability is 5nm, and the expanded uncertainty of the indication error measurement results is U2=7.0nm (k=2). The uncertainty of indication error measurement results for the constructed calibration device within the measurement range of 0~50mm is U1=3.0nm+2×10
-7
L (k=2).
2024 Vol. 45 (3): 412-418 [
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79
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419
Calibration Method for Optical Deflection System Display Screen Based on Surface Fitting
GUO Chuangwei,GUAN Yuqing,SHEN Yaoqiong,XU Ruishu,ZHU Yanzhen,LIU Liqin,ZHANG Yujie,LEI Lihua,FU Yunxia
DOI: 10.3969/j.issn.1000-1158.2024.03.16
A surface fitting method is proposed to fit the surface shape distribution of the display screen, which is the most critical calibration step in the transmission optical deflection system. A wavefront detection simulation model based on transmission optical deflection technique is established, and the impact of two different display screen surface fitting methods on wavefront measurement is analyzed. The simulation results show that the root mean square error (RMS) of the wavefront aberration of the planar screen model is 0.8375μm. The RMS value of the simulated wavefront aberration of the curved screen model is only 0.0596μm. Using a transmissive optical deflection system for wavefront measurement of spherical lenses, the RMS value of wavefront aberration in the curved screen model is 0.1371μm. The RMS value of wavefront aberration in the flat screen model is 1.4326μm. The experimental results show that the use of surface fitting is significantly better than plane fitting, confirming the feasibility of surface fitting screen models.
2024 Vol. 45 (3): 419-424 [
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125
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425
Research on PSD-based Straightness Measurement Method of Separated Long Guide Rail
JIN Ting,ZHU Jin,CHEN Ting,GUO Bin,SHEN Bin,KONG Ming,CHENG Yinbao,WANG Yinghui
DOI: 10.3969/j.issn.1000-1158.2024.03.17
The measuring range of the PSD-laser collimation measuring system can be expanded by using the piecewise splicing measurement method.Compared with the traditional method of measuring the straightness of long guide rails, the mentioned method can be used to measure the straightness of both continuous guide rails and separated superlong guide rails. Firstly, in the measuring range of (-5~+5)mm, the horizontal and vertical displacements of the receiving target of the laser collimation measurement system are respectively measured by the laser interferometer, and the errors are better than ±(1μm+1%H). Then, the straightness measurement accuracy is compared with that of the laser collimation measurement system in the range of 40m. The deviation of straightness in the horizontal direction is 0.06mm, and the deviation of straightness in the vertical direction is 0.13mm. Finally, the horizontal straightness is 0.50mm and the vertical straightness is 0.53mm on the 70m separated ultralong guide rail. The method can quickly locate and adjust the position of the extreme point of straightness error, and can effectively solve the problem of straightness assembly and debugging of separated ultralong guide rails.
2024 Vol. 45 (3): 425-432 [
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104
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433
Point Cloud Registration Method Based on Laser Scanner
CHU Haiman,CHENG Yinbao,LI Yaru,LUO Zai,JIANG Wensong,WANG Yan
DOI: 10.3969/j.issn.1000-1158.2024.03.18
Aiming at the difficult problem of aligning the incomplete point cloud obtained from the actual scanning of the laser scanner,a registration method based on corresponding point pairs is proposed.Firstly,experiments are conducted by a laser scanner to obtain the measured point cloud data of the measured workpiece and configuration of Point Cloud Library environment based on Visual Studio software to investigate the point cloud alignment of real and ideal models.Secondly,the measured point cloud data are preprocessed by voxel filtering and uniform downsampling.Then,the point cloud data are aligned by corresponding point pairs to provide a better initial value of the transformation for the subsequent fine alignment.The point cloud alignment is realized based on the ICP algorithm to realize the fine alignment.Finally,the root-mean-square error is used as an evaluation index of the accuracy of the point cloud alignment to evaluate the results of the alignment,and the results are analyzed with the aid of the CloudCompare software.The visual display and analysis show that the root mean square error of the alignment can be controlled at 0.62mm in the case where the measured workpiece itself is not absolutely smooth,which proves that the method has better results for the alignment of incomplete point clouds.
2024 Vol. 45 (3): 433-439 [
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83
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440
Research on Method of Data Optimization for 2D Laser Measurement of the Mining Ventilator Blade
LI Xuezhe,SHEN Yao,CAO Ai,WANG Yanxin,HUA Zhongxu,TIAN Wenyu
DOI: 10.3969/j.issn.1000-1158.2024.03.19
The extraction of measurement model is the key issue to detecting the geometric deformation of mining ventilator blades.In order to improve the accuracy of measurement model for the blade,a method of data optimization based on least squares principle for the 2D laser measurement is proposed.Firstly,the raw measurement data of the 2D laser sensor is processed based on Kalman filter algorithm in real-time,the accuracy of coordinate measurement is improved and the authentic data for subsequent model construction is provided.Then,three measurement models are solved respectively using methods of cubic polynomial,cubic B-spline,high-order Bessel,and the significance level of each model is evaluated based on the least squares principle,the measurement model suitable for the geometric characteristics of the ventilator blades is determined.Finally,the experimental research is implemented,and the results show that the best fitting effect can be achieved by establishing the measurement model of blade using cubic B-spline function,with the smallest significance evaluation factor (less than 0.05).The accuracy of the blade measurement model is effectively improved through data optimization, and provides an effective technical solution for subsequent geometric evaluation of fan blades.
2024 Vol. 45 (3): 440-446 [
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58
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447
Research on On-line Measurement Method for Metro Monitoring Robot
MA Juanjuan,ZHANG Xin,GUO Ruocheng,HU Junjie
DOI: 10.3969/j.issn.1000-1158.2024.03.20
Measuring robot is the main equipment of subway monitoring,its measurement verification is difficult,so it is urgent to establish a feasible calibration scheme.Based on the practical application scenario of the measuring robot, an online measurement calibration method is proposed, and three key technical indexes of ATR angle resolution, range resolution and spatial distance measurement error are established. Then, taking the resolution test stand and the length scale with the spherical prism as the standard equipment,the specific calibration method is studied and determined,and the measurement uncertainty is evaluated. Finally,the simulation experiments and on-line calibration of 4 sets of Wuhan Metro monitoring equipment reflect the technical performance of different equipment accurately,and verify the feasibility and effectiveness of the method.The method also provides a reference for ATR function calibration of all measuring robots.
2024 Vol. 45 (3): 447-454 [
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102
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455
Evaluation Method of Cone’s Global Angular Size
ZHAO Xinyu,ZHAO Zexiang,LI Bin,REN Dongxu,XI Jianpu
DOI: 10.3969/j.issn.1000-1158.2024.03.21
The evaluation methods of cones global angular sizes were promoted based on the roundness profile extraction strategy, and the evaluation models of the least square global angular size and the minimax global angular size of cone were built. Based on the established evaluation model, the flowchart of the moth-flame optimization algorithm for evaluation of cones global angular sizes were given. The least square and minimax global angular sizes of four cone simulated samples were evaluated by using the developed program, and their evaluation results and optimization characteristics values obtained based on different evaluation methods, different optimization initial values and different optimization algorithms were compared. The minimax global angular sizes of one sample were evaluated using crow search algorithm, artificial ecosystem-based optimization, equilibrium optimizer and particle swarm optimization, and their results were compared with those of MFO. In addition to the influence of optimization initial values, the evaluation results were influenced by the search interval, the population number and the maximum number of iterations, but their influence regularities were not strong. In general, the results evaluated by MFO are better than those evaluated by the other four optimization methods.
2024 Vol. 45 (3): 455-464 [
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95
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