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2016 Vol. 37, No. 5
Published: 2016-09-22
 
457 Study on the Measuring and Control System of Metrological Scanning Electron Microscope
ZHANG Rui-jun,GAO Si-tian,LI Wei,CHEN Ben-yong,SHI Yu-shu,LI Qi
DOI: 10.3969/j.issn.1000-1158.2016.05.01
In order to solve the deficiency in precise measurement of micro-nano geometry structure dimension under 100nm of scanning electron microscope(SEM) and realize the quantity transfer and traceability of measurement values, the control and measuring system of metrological SEM is developed. The system consists of the motion control module of positioning stage, the displacement measurement module based on laser interference method and the image acquisition and processing module. The control and measuring system software is developed based on LabVIEW graphical programming language. Finally the measurement experiment of 1 μm×1 μm two-dimensional grid sample is conducted with the system and the results show that the control and measuring system of metrological SEM is in good stability and the indication error of measurement values is better than 10 nm in the 10 μm measuring range.
2016 Vol. 37 (5): 457-461 [Abstract] ( 682 ) HTML (1 KB)  PDF (5283 KB)  ( 967 )
462 Research on Uncertainty Estimation Model of CMM for Size Measurement
CHENG Yin-bao,CHEN Xiao-huai,WANG Han-bin,WU Jun,LI Hong-li,XU Lei
DOI: 10.3969/j.issn.1000-1158.2016.05.02
The method of uncertainty estimation of coordinate measuring machine (CMM) for size measurement is presented.Black box model, which complies with the specifications of ISO, is established for uncertainty estimation of CMM. Six quantum property factors and their quantification or calibration introduced by the uncertainty components are analyzed based on measurement system analysis. The evaluation models of uncertainty components are presented according to geometrical product specification (GPS). This method has proven to be feasible by the example of uncertainty estimation for diameter measurement of an experimental sample. Experimental result shows that the main source of uncertainty of CMM for size measurement is bias and linear, and its numerical value is 1.88 μm which is more than twice the combination of all the other uncertainty components. Moreover, the uncertainty component of temperature is only 0.04 μm, it can be neglected in practice.
2016 Vol. 37 (5): 462-466 [Abstract] ( 781 ) HTML (1 KB)  PDF (833 KB)  ( 935 )
467 Study of de-noising based on EMD Algorithm in grating Moiré Fringe signal
YANG Hua-hui,LIU Fu,FENG Wei-li
DOI: 10.3969/j.issn.1000-1158.2016.05.03
In view of the quality problem of metrological grating Moiré fringe signal, a method based on empirical mode decomposition (EMD) algorithm is presented for non-stationary metrological grating Moiré fringe signal de-noising. A non-stationary factual dynamic grating signal model was established. The simulation experiment of filtering analysis was conducted for several grating signal models with different noise by using the EMD algorithm advantages which is not required to define the filter parameters. The two indicators of SNR and RMSE shown that the EMD filtering outperforms the median and wavelet threshold methods. Add the high-order harmonic components to the sine & cosine ideal signals and the ideal compensation results of sine deviation error in metrological grating Moiré fringe signal de-noised processing can be verified by comparing before and after Lissajous figures of suppressing the high-order harmonics with EMD algorithm.
2016 Vol. 37 (5): 467-471 [Abstract] ( 578 ) HTML (1 KB)  PDF (6812 KB)  ( 982 )
472 Study on an Two Phase-shifting Profilometry with an Arbitrary Steps Algorithm
XU Jian-liang,ZHOU Ming-an,FANG Xiao-fen
DOI: 10.3969/j.issn.1000-1158.2016.05.04
The traditional PSP was researched. Based on a Gram-Schmidt(GS) orthonormalization approach, an two PSP with an arbitrary steps algorithm is proposed. The phase-shift value has not to be known and can taken any value inside the range. Compared with the existing methods, the method can only have two distorted grating image, and thire phase shift accuracy is not required. Experimental results show that compared with the existing methods, the structure is less demanding for the accuracy of the system, and the proposed method is faster, higher accuracy and more effectively.
2016 Vol. 37 (5): 472-475 [Abstract] ( 599 ) HTML (1 KB)  PDF (1014 KB)  ( 1925 )
476 Research on Measurement Traceability for Concrete Reinforcing Position Meter
LIU Lu,LIU Jing,REN Zheng-yue,HUANG He
DOI: 10.3969/j.issn.1000-1158.2016.05.05
To solve the traceability problem of concrete reinforcing position meter in the transportation sector, the status of the use and measurement for concrete reinforcing position meter is analyzed, metrological parameters are confirmed, standard sets and standard apparatus are developed, and the repeatable tests verification is carried out. A tracing links of “concrete reinforcing position meter — standard sets of concrete reinforcing position meter — standard apparatus of concrete reinforcing position meter — national length measuring standards” is established to be able to meet the needs of verification/calibration for the reinforced concrete position meter.
2016 Vol. 37 (5): 476-479 [Abstract] ( 468 ) HTML (1 KB)  PDF (2928 KB)  ( 773 )
480 Research on Calibration Method of Burst Optical Power Meterin Passive Optical Network
SUN Xiao-qiang,FU Dong-bo,LI Ran,ZHOU Feng,ZHANG Ying-yan
DOI: 10.3969/j.issn.1000-1158.2016.05.06
A calibration method of burst optical power meter is presented using a continuous optical power meter and an oscilloscope. A stable optical pulse source with ±0.01dB/15min is designed and fabricated, and effective traceability of burst optical power is realized by converting direct measurement of pulse power into indirect measurement of average power. Meanwhile, uncertainty evaluation method is presented and uncertainty of 0.2dB (k=2) is obtained when the resolution is 0.1dB. This method and apparatus is widely applied in calibration of burst optical power meters, and maintaining measurement accuracy of burst optical power in practical application.
2016 Vol. 37 (5): 480-483 [Abstract] ( 691 ) HTML (1 KB)  PDF (4683 KB)  ( 874 )
484 Stitching Measurement of Plane Optical Element Flatness by Dynamic Interference
ZHANG Xiao-qiang,WU Xin,WANG Wei-rong,YU Ying-jie
DOI: 10.3969/j.issn.1000-1158.2016.05.07
The stitching measurement of plane optical element flatness is carried out based on dynamic interferometer and it studies the main factors affecting the measurement.The environment vibration is suppreseed using two grade damping.It controls the precision of two-dimensional mobile platform according to the allowed change numbers of stripe.It establishes an interference stitching system using the ZYGO company’s DynaFiz interferometer for sub-aperture data acquisition instrument. The single aperture flatness measurement and stitching measurement experiments were carried out. The flatness measurement of the 200mm×300mm plane optical element was completed and the results with the full aperture measurement data measured by a large diameter interferometer was compared. The stitching results variance of 10 experiments is 0.001λ(λ=632.8nm).
2016 Vol. 37 (5): 484-488 [Abstract] ( 682 ) HTML (1 KB)  PDF (1324 KB)  ( 816 )
489 A Combination of Measuring Methods for Modulation Transfer Characteristic of Proximity X-ray Imaging System
MU Yi-ning,WANG He,LI Ye,LI Ping,ZHU Ling-xi
DOI: 10.3969/j.issn.1000-1158.2016.05.08
Using the evaluating principle of modulation transfer function, an optical modulation transfer characteristic detection methodology of proximity focusing X-ray imaging system is brought up on the basis of the signal transfer relationship between each imaging subsystem. From the constraints of image-intensifier tubes, the generation process of ray source and imaging restriction of its spot size constraints, the constraints of noise three perspectives to calibrate theoretical modulation transfer characteristic of proximity X-ray imaging system. Change CCD telescopic system of proximity X-ray imaging system back end to CCD microscopy system, to multi-spatial resolution balls of lead grating imaging and MTF curve fitting, and as the experimental results suggest, the curve fitting precision can be significantly improved by time domain equalization. Fitting results indicate that modulation transfer function still are equal to 10% when spatial resolution reaches 10lp/mm, this is consistent with that of the theoretical calibration. So that the resolution of traditional proximity X-ray imaging system is really the bottleneck.
2016 Vol. 37 (5): 489-493 [Abstract] ( 628 ) HTML (1 KB)  PDF (4797 KB)  ( 612 )
494 Pseudo Random Color Encoded Image Feature Points Matching Based on Neural Network
LIAO Su-yin,WU Bo,WEI Min,ZHAO Yan,LI Gui-hua,ZHANG Mei
DOI: 10.3969/j.issn.1000-1158.2016.05.09
In order to study the theory of uncalibrated 3D euclidean reconstruction based on single image. An effective active- machine technique with structured light illumination is introduced which applies pseudo-random color code. Each interest point on scene surface can be identified exclusively according to the window property of pseudo-random array. It is found out that this active machine system can solve the correspondence between images in the passive machine system. Image recognition using neural networks can easily solve characteristic point match problem in coding structured light active vision system, the experiment is satisfactory.
2016 Vol. 37 (5): 494-498 [Abstract] ( 689 ) HTML (1 KB)  PDF (840 KB)  ( 675 )
499 Method of Rotating Machinery Fault Diagnosis Based on Gabor Transform and Blind Source Separation
MENG Zong,WANG Xiao-yan,ZHOU Ming-jun,YIN Na
DOI: doi: 10.3969/j.issn.1000-1158.2016.05.10
In the traditional blind source separation (BSS), the condition of actual mechanical equipment is very difficult to satisfy that the source signals must be mutually statistically independent. A new method of rotating machinery fault diagnosis based on Gabor transform and BSS is proposed. Firstly, the common frequency components of source signals can be obtained by the ratios of the coefficients of the mixed signals in Gabor transform coefficient. Then, the new observed signals are obtained by filtering, and the jointly approximate diagonalization of eigen-matrix (JADE) is applied to the new observed signals. Even if the source signals are correlative, or there is more than one Gaussian signal in the sources, the new method can get better separation performance. Simulation and experiment results verify the effectiveness and feasibility of the proposed method.
2016 Vol. 37 (5): 499-504 [Abstract] ( 508 ) HTML (1 KB)  PDF (2283 KB)  ( 398 )
505 Research on the Predictive Algorithm of Rolling Force Based on the Improved Fruit Flies Optimization Algorithm with LSSVM
YANG Jing-ming,GUO Qiu-chen,SUN Hao,MA Ming-ming,CHE Hai-jun,ZHAO Xin-qiu
DOI: 10.3969/j.issn.1000-1158.2016.05.11
In the process of aluminum alloy plate finishing, rolling force is an important factor affecting the quality of plate. In order to meet the scene of the rolling forecast accuracy, improved fruit flies optimization algorithm (FOA) is combined with least square support vector machine (LSSVM) for rolling force prediction. The function of smell and the method of step length setting are improved. The grouping parallel search strategy is used. A new method based on the improved FOA-LSSVM is proposed for rolling force prediction. The method is used in simulation experiment of field data of aluminum strip, the results show that the prediction error data is in the range of ten percent, and eighty-four percent of these error data is in the range of five percent, the result shows that this method is better than the traditional model.
2016 Vol. 37 (5): 505-508 [Abstract] ( 553 ) HTML (1 KB)  PDF (420 KB)  ( 641 )
509 A New Method to Optimize Endpoint Effect in HHT
ZHAO Jun,LI Lin-feng,GUO Tian-tai,WANG Dao-dang,KONG Ming
DOI: 10.3969/j.issn.1000-1158.2016.05.12
In fault diagnosis of rotating machinery, Hilbert-Huang transform (HHT) is often used to extract the fault characteristic signal and analyze decomposition results in time-frequency analysis. However, end effect occurs in HHT, which leads to a series of problems such as modal aliasing and false intrinsic mode function(IMF). To solve this problem, a novel method to optimize end effect in HHT through combination of generalized regression neural network (GRNN) and boundary local characteristic-scale continuation (BLCC) to extend signal is proposed, then followed by empirical mode decomposition (EMD). Simulation and measurement experiment for the conditions of time domain, frequency domain and related parameters of Hilbert-Huang spectrum verified the effectiveness of the proposed method through comparison with the results obtained by mirror continuation. The experimental results show that the method can effectively inhibit end effect, reduce modal aliasing and false IMF components, and accurately show the real structure of signal components.
2016 Vol. 37 (5): 509-514 [Abstract] ( 660 ) HTML (1 KB)  PDF (2015 KB)  ( 710 )
515 Elevator Fault Stop Diagnosis Based on Wavelet Packet Energy Spectrum and Evidences Fusion Reasoning
ZHANG Bin,SHEN Guo-yang,JIN Ying-lian,WANG Bin-rui
DOI: 10.3969/j.issn.1000-1158.2016.05.13
The feature vector will be got by using the kurtosis coefficient of time domain signal and the entropy spectral of the frequency domain signal after wavelet packet transformation, and this is defined as DS evidence. The eigenvalues interval through sample statistics will be obtained. The similarity based on the eigenvalues and the length between the intervals of the test sample was designed, and the basic probability assignment function by normalization will be obtained. Then the DS combination rule by spatio-temporal combination of the evidence was got. And the DS diagnosis results by using reliability allocation function can be obtained. Finally, the experiments will be carried out and diagnosis results by using sym8 for three-layer wavelet packet transformation and 9 evidences are received. The experimental results show that the diagnostic accuracy of this method about elevator fault stop is more than 98%.
2016 Vol. 37 (5): 515-519 [Abstract] ( 654 ) HTML (1 KB)  PDF (1003 KB)  ( 432 )
520 Research on Hydroacoustic Transducer Sound Field Reconstruction Method Based on Near-field Measurement Method
WANG Cheng,ZHENG Hui-feng,WANG Yue-bing,YIN Jing-wei
DOI: 10.3969/j.issn.1000-1158.2016.05.14
In order to improve the efficiency of analysing hydroacoustic transducer sound field, the research focusing on reconstruction method of hydroacoustic transducer sound field was developed based on near-field measurement. Firstly, the holographic measuring surface of hydroacoustic transducer was seemed as source surface, which made it realizable to obtain the sound field reconstruction model by integration. Then, took advantage of self-developed underwater acoustic measurement system to obtain the complex sound pressure of emission transducer at holographic measuring surface, according to which sound field was reconstructed. And finally, as well as ascertaining a valid measurement interval for the reconstruction method by comparing the different reconstruction results of holographic measurement surface and measured data and analyzing the impact of the holographic measurement plane position on reconstruction error. The sound field reconstruction method could obtain the field distribution of hydroacoustic transducer quickly, and it is accurate and reliable.
2016 Vol. 37 (5): 520-524 [Abstract] ( 671 ) HTML (1 KB)  PDF (11869 KB)  ( 521 )
525 The Design of Five New Chaotic Systems on Weak Signal Detection
LIU Jian-ming,YANG Xia,SONG Fei-fei,LIU Fu-cai
DOI: 10.3969/j.issn.1000-1158.2016.05.15
To further improve the ability on weak signal detection with chaotic system, the five new high-sensitive complex chaotic systems on weak signal detection are designed. The comparative analysis of one of them with the widely used Duffing chaotic weak signal detection system are done. The finding is that the new complex chaotic system is likely to overcome the three widely appeared problems when using the Duffing system, which are: the chaotic state usually cannot quickly and automatically resume after the detected signal disappears, the large periodic state is instable, and it is difficult to distinguish the chaotic state from the periodic state. Analysis by using Jacobian matrix and characteristic equation shows that the new complex chaotic systems are more effective than the Duffing chaotic system. Compared with the traditional weak signal detection method, the new complex chaotic systems are preferable with their simpler circuit design, the lower SNR and lower detection threshold. The results of theoretical analysis and experiment show the features of the new complex chaotic systems.
2016 Vol. 37 (5): 525-530 [Abstract] ( 538 ) HTML (1 KB)  PDF (1784 KB)  ( 562 )
531 Design of Bulk Current Injection Probe Calibration-jig
ZHOU Yan-ran,JING Shen-hui,ZHOU Zhong-yuan
DOI: 10.3969/j.issn.1000-1158.2016.05.16
The design method of injection current probe calibration-jig is introduced. The influence of the gap between the probe and the jig on transmission performance is analyzed by numerical simulation, and the key size of the jig is determined by means of parameter optimization. The design method is verified by measurements.
2016 Vol. 37 (5): 531-534 [Abstract] ( 683 ) HTML (1 KB)  PDF (6244 KB)  ( 1241 )
535 Study on Blind Source Separation of Dual/Single-channel Conducted EMI Noise
ZHAO Bo,ZHAO Min,MA Yu-ming,SHEN Fei
DOI: 10.3969/j.issn.1000-1158.2016.05.17
Aiming to the complexity and high-cost of hardware-based separation network in conducted electromagnetic interference noise, as well as the poor anti-noise ability and measuring synchronism of traditional software-based separation approach, an EMI difference mode and common mode noise extracted strategy based on blind source separation theory is presented. Firstly, the fast independent component analysis algorithm is used for live and null line noise extraction, with a dual-channel BSS approach. Experiments demonstrate a wider signal-to-noise ratio range than RF current approaches, meaning stronger applicability. Then, the single-channel BSS approach extends extra virtual channel using continuous wavelet transform algorithm. Tests prove the separation performance depends on the choice of wavelet function, rather than the number of extended channels. Single-channel BSS approach saves economic cost and possesses wide prospect, with a little less separation ability.
2016 Vol. 37 (5): 535-539 [Abstract] ( 723 ) HTML (1 KB)  PDF (7045 KB)  ( 352 )
540 Re-discussion and Solution for Mismatch in Noise Quantity Transfer
GAO Shen-xiang,HUO Ying,CUI Bao,SUN Chao-bin
DOI: 10.3969/j.issn.1000-1158.2016.05.18
Illustrated by the case of Medium Frequency Attenuation noise measurement, a mismatch model is proposed to solve the problem of larger uncertainty of noise transfer of domestic laboratories. Based on the research of measurement uncertainty for complex quantities with unknown phase, an optimal estimation of mismatch uncertainty is described. With the more accuracy estimation of mismatch uncertainty, the effectiveness and the use strategy of the isolation attenuator are discussed. The best solution of mismatch in noise measurement is proposed at last.
2016 Vol. 37 (5): 540-543 [Abstract] ( 583 ) HTML (1 KB)  PDF (1986 KB)  ( 656 )
544 Monte Carlo Simulation of Physical Parameters for Air Kerma Measurement by Graphite Pancake Ionization Chamber
WANG Kun,LI Tao,JIN Sun-jun,YANG Xiao-yuan,FAN Tie-shuan
DOI: 10.3969/j.issn.1000-1158.2016.05.19
In order to establish the air kerma primary standard based on a graphite pancake ionization chamber for 60Co gamma rays, the radiation field and related physical parameters of the chamber are calculated by the Monte Carlo simulation method. The γ-ray energy spectra and fluence distributions are calculated by the model built by BEAMnrc code, the parameters of the graphite pancake ionization chamber in 60Co γ-ray radiation filed are calculated by EGSnrc code. The combined standard uncertainty of the parameters of the chamber calculated by Monte Carlo method is 0.20%, the results of simulation are accord with results of the same structural chamber from the ARPANSA in the region of the uncertainty. And the change of the values with the primary standard based on a sphere-cylindrical graphite ionization chamber is under expected.
2016 Vol. 37 (5): 544-547 [Abstract] ( 612 ) HTML (1 KB)  PDF (619 KB)  ( 923 )
548 Soft Measurement Modeling and Chemical Application Based on ISOMAP-ELM Neural Network
LI Rong-yu,WANG Li-ming
DOI: 10.3969/j.issn.1000-1158.2016.05.20
In view of the chemical process, it is difficult to build a corresponding mechanism model, a soft sensor model based on ISOMAP-ELM is proposed. It combines ISOMAP with ELM, through the ISOMAP, the input data can reduce its dimensionality, eliminate the colinearity among each other, and extract more representative characteristics. Finally, the extracted feature components are sent to ELM to build a soft sensor model. Verification results show that the proposed algorithm has a high prediction precision,model squared error is only 0.28, and the hit rate of the soft sensor model is 94%, it can give guidance for chemical process.
2016 Vol. 37 (5): 548-552 [Abstract] ( 507 ) HTML (1 KB)  PDF (912 KB)  ( 554 )
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