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2015 Vol. 36, No. 1 Published: 2015-01-22

	1	Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy
		ZHANG Hua-kun, GAO Si-tian, LI Wei, SHI Yu-shu, WANG He-qun
		DOI: 10.3969/j.issn.1000-1158.2015.01.01
		Dual probes alignment measurement can virtually eliminate the effect of tip shape of traditional atomic force microscopy (AFM) on critical measurement (CD). Two tips (probe A and probe B) need contact to each other before measurement to establish a zero reference point. A method of progressive two-dimensional scanning is used to realized dual-probe nanoscale alignment. Firstly, it will align two probes to within 1μm through vision guidance. Secondly, the two probes continue to close, probe B is scanned by probe A in plane XOZ while reducing the scanning range and scanning step gradually to get the nanometer coordinate of probe B (Y_B，Z_B). Lastly, the probe A will be move to YB and ZB in X and Z directions respectively, untill the probe A moves to touch the probe B in X direction. Results indicated that this method can effectively align dual probes, and the alignment accuracy is 10 nm.
		2015 Vol. 36 (1): 1-5 [Abstract] ( 685 ) HTML (1 KB) PDF (2572 KB) ( 546 )

	6	The Research of Nanometer Linewidth Calibration Method Used by 248 nm Ultraviolet Microscope
		LI Qi,LI Wei,SHI Yu-shu,GAO Si-tian,LI Shi,WANG He-qun,YIN Chuan-xiang
		DOI: 10.3969/j.issn.1000-1158.2015.01.02
		When utilizing 248 nm ultraviolet illumination, the microscope can attain as high as 80nm optical resolution, which can achieve the measurements of linewidth and one /two dimensional pitches of photomasks. But at present, the measurement uncertainty of 248 nm UV microscope is not known yet, it is need to do calibration for the instrument. Since the measurement range of 248 nm UV microscope is within nanometer range, it is reasonable to use 400 nm one dimensional pitches standard materials to do calibration. Through the estimation of instrument uncertainty and standard materials own uncertainty, it can calculate the expansion uncertainty of a single pixel which equals to 0.178 nm, and the uncertainty estimation formula of measurements are given.
		2015 Vol. 36 (1): 6-9 [Abstract] ( 696 ) HTML (1 KB) PDF (5584 KB) ( 452 )

	10	Precise Measurement Method of Optical Fiber Length
		ZHANG Ying-yan,SUN Xiao-qiang,FU Dong-bo,YUE Lei,LIU Li,LI Ran,YANG Kun
		DOI: 10.3969/j.issn.1000-1158.2015.01.03
		A precise and dead-zone-free method of optical fiber length measurement was proposed based on Gaussian optical pulses delay technique.Using optical fiber delay loop, two Gaussian pulses sequences with relative delay were observed in the high-speed oscilloscope.The two Gaussian pulses coincided with each other by adjusting the pulses frequency, and the optical fiber length could be calculated by the frequency.Frequency measurement errors would be induced if the two Gaussian pulses coincided incompletely.Complete coincidence could be judged by measuring the maximum amplitude according to delay-to-amplitude conversion. The frequency resolution achieved 0.1 Hz leading to high measurement accuracy. Experimental results showed that the uncertainty was 0.04 m for 2284.34 m G.652 single mode fiber (SMF), and 0.24 m for 12726.57 m SMF when wavelength of the optical source was 1296 nm.
		2015 Vol. 36 (1): 10-13 [Abstract] ( 711 ) HTML (1 KB) PDF (3419 KB) ( 572 )

	14	Research on Calibration Method of High-precision Capacitive Displacement Sensor
		ZHENG Zhi-yue,SHI Yu-shu,GAO Si-tian,LI Dong-sheng,LI Wei,LI Shi,LI Qing-xian
		DOI: 10.3969/j.issn.1000-1158.2015.01.04
		A calibration method of high-precision capacitive displacement sensor is described based on laser interferometer and a single axle precision displacement stage, and developed a set of calibration device. Taking advantage of the relationship between the voltage and the displacement, the single axle precision displacement stage generate nano-scale displacement, meanwhile using laser interferometer and the capacitive displacement sensor to be calibrated to measure the small displacement synchronously. The device can precisely calibrate linearity, repeatability and measurement resolution of the capacitive displacement sensor. Finally, the calibration accuracy and practicability of the method are verified by experiments,the main factors affecting calibration are analyzed and the measurement uncertainty is 2.2 nm .
		2015 Vol. 36 (1): 14-18 [Abstract] ( 942 ) HTML (1 KB) PDF (1227 KB) ( 1056 )

	19	Research on Indoor Virtual Linear Baseline
		PAN Jia-sheng,HUANG Su,ZHANG Yong
		DOI: 10.3969/j.issn.1000-1158.2015.01.05
		A virtual indoor straight baselines is researched. The method of calibration for virtual linear baseline by electronic total station and the principle of establishing indoor straight baselines are proposed. With the sources of uncertainty analyzing, the expanded uncertainty U=1.4 mm (k=2) is estimated, when the distance of the virtual indoor straight baselines is 100 meters. The hand-hold laser distance meter is tested by using the virtual indoor straight baselines. The results show that it is reliable.
		2015 Vol. 36 (1): 19-21 [Abstract] ( 756 ) HTML (1 KB) PDF (357 KB) ( 944 )

	22	Effect of Sampling Interval on the Measurement of the Total Luminous Flux of LED
		ZHAO Wei-qiang,LIU Hui,LIU Jian,YANG Chen-zhu
		DOI: 10.3969/j.issn.1000-1158.2015.01.06
		With the computer to simulate LED spatial illuminance distribution and LEDs total luminous flux measurement process of a goniophotometer,showing the effect of different sampling interval on the measuring of four types of LEDs,whose intensity spatial distribution curves are of quasi-Lambert,tomato,double-wings,and narrow beam respectively. Axial or non-axial symmetric types are both considered. The calculation results show that,for common LED light source,a usage is recommended with a 2° interval and amount of sections greater than 12. The systematic error of sampling interval with a goniophotometer can be controlled within 0.3%.
		2015 Vol. 36 (1): 22-25 [Abstract] ( 718 ) HTML (1 KB) PDF (1190 KB) ( 640 )

	26	The Annealing Effect on the Performance of the Standard Platinum Resistance Thermometer
		DENG Xiao-long,SUN Jian-ping,YUE Kai,LI Jie,WU Xin-cai
		DOI: 10.3969/j.issn.1000-1158.2015.01.07
		Annealing is the most effective means to eliminate internal stress of SPRT that is due to factors such as mechanical vibration.At the same time, it may change the internal oxidation state of platinum wire.Four SPRTs from different countries are chosen,these SPRTs are annealed at five different temperatures (600 ℃、500 ℃、450 ℃、420 ℃、350 ℃) for 4 hours to investigate their stability at room temperature after annealing.The results show that different annealing temperature can produce different effects on resistance of thermometers,equivalent to temperature changes maximum 1 mK,the water triple point resistance changed significantly in 0 to 6 hours, to keep the platinum resistance thermometer in a same thermal state can effectively improve the temperature measurement level.
		2015 Vol. 36 (1): 26-30 [Abstract] ( 812 ) HTML (1 KB) PDF (1988 KB) ( 1309 )

	31	An Inner Wall Condition Monitoring Method for the Heat-transfer Pipe Equipment
		ZHANG Yu-cun,ZHOU Shan,WEI Bin,FU Xian-bin
		DOI: 10.3969/j.issn.1000-1158.2015.01.08
		The heat conduction equation is solved under specific boundary conditions.The optimized coefficients of the resulted temperature distribution equation are simplified with the piecewise integral method, so the associated model of the heat-transfer pipe device is established.The relationship of the surface temperatures, the material properties and the inner wall condition of the heat-transfer pipe equipment is described in the associated model.And this model is applied in the inner wall condition monitoring for the heat-transfer pipe equipment.Combining with the inverse heat conduction problem, the surface temperature data is analyzed with the associated model to get the inner wall geometrical shape.The feasibility of this method is verified by simulation experiment.This method also provides a basis for the real-time monitoring of the heat-transfer pipes internal condition.
		2015 Vol. 36 (1): 31-36 [Abstract] ( 560 ) HTML (1 KB) PDF (950 KB) ( 557 )

	37	The Anti-strong Vibration Method Based on Noise Template and Cross Correlation Calculation for Vortex Flowmeter
		XU Ke-Jun,WANG Qin,FANG Min,SHAO Chun-li
		DOI: 10.3969/j.issn.1000-1158.2015.01.09
		A vibration experimental set-up of the vortex flowmeter is built and the vibration experiments are performed according to practical conditions of vortex flowmeter subjected to the strong vibration noise in industrial fields. The experimental data are analyzed by the power spectrum to obtain the features of frequency bandwidth. The noise templates are built up, and the frequency bandwidth characteristics of noise are described quantitatively. Cross correlation between the noise template and the power spectrum of vortex sensor output signal is calculated. A new kind of method is proposed by using the normalized cross correlation coefficient curves of the noise and vortex signal so as to distinguish the vortex signal from the strong vibration noise. The experimental data collected in the vibration experiments are processed with this algorithm to verify its effectiveness.
		2015 Vol. 36 (1): 37-42 [Abstract] ( 631 ) HTML (1 KB) PDF (516 KB) ( 516 )

	43	Forecasting of Turbine Main Steam Flow Based on Rough Sets and Least Squars Support Vector Machine Regression
		ZHANG Wei-ping,ZHAO Wen-lei,LI Guo-qiang,NIU Pei-feng
		DOI: 10.3969/j.issn.1000-1158.2015.01.10
		A new prediction method is put forward in view of the shortages of traditional main steam flow calculation method,which combines the advantages both rough set theory and least squares support vector regression algorithm. Therefore,this new method is called RS-LSSVR. In RS-LSSVR,the attributes reduction of input variable by genetic algorithm is carried out on the ROSETTA V1.4.41 research experimental platform,then the main steam flow prediction model is established by LSSVR algorithm.The simulation results show that the method based on RS-LSSVR has better prediction precision and generalization ability compared with BP algorithm, support vector regression algorithm and LSSVR algorithm without treated by the RS theory.Moreover,the modeling speed increases significantly.
		2015 Vol. 36 (1): 43-47 [Abstract] ( 628 ) HTML (1 KB) PDF (420 KB) ( 557 )

	48	Image Reconstruction of Ultrasonic Process Tomography Based on Fast Two-parameter Regularization Algorithm
		ZHANG Lin,SHAO Fu-qun,ZHOU Ming
		DOI: 10.3969/j.issn.1000-1158.2015.01.11
		A new adapted step two-parameter regularization algorithm is presented to reconstruct image in ultrasound tomography system for detecting distribution of slurry concentration. The overdetermined solution, as a priori information, is embedded into the regularization function by using the transition matrix for accelerate reconstruction.Higher space resolution is achieved and the over-smoothing deficiency of the reconstruction can be avoided effectively. The simulation results show that,compared to Tikhonov regularization algorithm and Landweber algorithm, the correlation coefficient of the reconstructed image by using SATPR are significantly improved and the boundary information of image is more reliable.
		2015 Vol. 36 (1): 48-53 [Abstract] ( 766 ) HTML (1 KB) PDF (4197 KB) ( 739 )

	54	A Novel Water Meter Calibration Method Based on Machine Vision Technology
		TANG Si-meng,ZHAO Jie-yu,LU Xiao-feng
		DOI: 10.3969/j.issn.1000-1158.2015.01.12
		The machine vision technology applied to the water meter calibration is discribed. Several high speed and high resolution cameras are installed at the top of the checked meter to dynamically access the running water meter image. The meter pointer is accurately positioned using color feature modeling and background Gaussian fitting methods. Machine vision approaches are used to convert the captured images into digital readouts. Encountered problems such as blurred surface and air bubble interfere are overcome. The developed system realizes high efficient automatic water meter verification.
		2015 Vol. 36 (1): 54-57 [Abstract] ( 705 ) HTML (1 KB) PDF (726 KB) ( 975 )

	58	Simulation Research on Weight Function of Multi-electrode Electromagnetic Flowmeter
		KONG Ling-fu,DU Sheng-xue,LI Ying-wei
		DOI: 10.3969/j.issn.1000-1158.2015.01.13
		Adopting the finite element method, when the electrodes are in different positions, the numerical simulations for weight function of electromagnetic flow meter with six electrodes are carried on. Then two indexes indicating the evenness of weight function have been put forward: the maximum deviation and the overall evenness, and the distributions of weight function while the number of electrodes are different and the electrodes are in different locations are analyzed based on these indexes. The results show that weight function distribution of electromagnetic flow meter is related not only with the number of electrodes but also with position of electrodes. By reasonable designing the position of electrodes, the electromagnetic flowmeter with six electrodes is superior to dual-electrode electromagnetic flowmeter in both of the uniformity and the average strength of weighting function distribution.
		2015 Vol. 36 (1): 58-62 [Abstract] ( 586 ) HTML (1 KB) PDF (1558 KB) ( 665 )

	63	Study on Mass Detectable Quantity of Quartz Crystal Microbalance
		CHEN Yan,HUANG Xian-he
		DOI: doi: 10.3969/j.issn.1000-1158.2015.01.14
		The vibrational displacement on crystal surface is analyzed on the basis of mass detection principle of quartz crystal microbalance,leading to the conclusion that the physical quantity which determines the mass sensitivity in every point on the electrode surface of the crystal is the acceleration of the crystal vibration in that point. Based on this conclusion,the Butterworth-Van Dyke equivalent circuit of crystal resonator was employed to obtain the computational method of oscillation amplitude on the surface of the quartz crystal microbalance resonator,thus obtaining the average detectable mass of quartz crystal microbalance in the overall detection process. The experimental result was generally in line with theoretical value (at the picogram level) when experimented on a 10MHz quartz crystal microbalance.
		2015 Vol. 36 (1): 63-66 [Abstract] ( 602 ) HTML (1 KB) PDF (315 KB) ( 520 )

	67	Correction in Calibration Matrix of Six-axis Force Sensor Based on Independent Component Analysis
		LIU Bao-hua,CHI He-xiang,LI Shuo-guo
		DOI: 10.3969/j.issn.1000-1158.2015.01.15
		To improve the measurement accuracy of the six-dimensional force sensor,a static calibration method based on independent component analysis (ICA) is proposed. Force acting on the platform forms mixed-signal after the six-dimensional force sensor. Firstly, the mixed-signal is decomposed to separate components with ICA. Then combined with the ideal source signal to recover the real sort and amplitude of the dimensional force,and finally came to the corrected calibration matrix. The simulation results show that,the corrected calibration matrix is closer to the standard one,which improves the measurement accuracy of the six-dimensional force sensor.
		2015 Vol. 36 (1): 67-71 [Abstract] ( 797 ) HTML (1 KB) PDF (1277 KB) ( 518 )

	72	Study on Tracing Technique for Field Test Mobile Reference Vehicle Speed Meter
		BAI Yin,SUN Qiao,DU Lei,YU Mei,BAI Jie,CAO Jin
		DOI: 10.3969/j.issn.1000-1158.2015.01.16
		To study the tracing technology of field test mobile reference vehicle speed meters based on optical sensor and GPS receiver respectively, simulated and field test of speed measurement experiments for both non-contact vehicle speed meter and GPS vehicle speed meter were performed and the results were compared. The calibration of non-contact automotive speed meter was performed with synchronous belt simulator. The calibration was performed on several speed values in the range of 10～180km/h. A GPS signal simulator system was used in simulated speed measurement error test for GPS automotive speed meter. The same speed values as that in the calibration of non-contact speed meters were tested. The field test performance of both reference speed meters was compared. The relative deviations in uniform motion fell in the range of ±0.3%. The relative deviations in acceleration and deceleration were much larger. The largest relative deviation fell in the range of ±8%, which was caused by the lagging effect of non-contact automotive speed meter. It is inferred that the performance of GPS automotive speed meter is better than that of non-contact automotive speed meter, when at least 6 satellites can be found by GPS automotive speed meter.
		2015 Vol. 36 (1): 72-76 [Abstract] ( 814 ) HTML (1 KB) PDF (867 KB) ( 513 )

	77	Method of Rotating Machinery Fault Diagnosis Based on LMD and Local Time-frequency Entropy
		MENG Zong,LI Shan-shan,WANG Ya-chao
		DOI: 10.3969/j.issn.1000-1158.2015.01.17
		A method based on LMD (Local Mean Decomposition) and local time-frequency entropy in rotating machinery fault diagnosis is proposed. Aiming at bearing, the vibrating signal is decomposed into PFs (Product Functions) by LMD, and then Hilbert transformation is applied to every PF to get time-frequency distribution. The local time-frequency entropy is introduced to study the energy in time-frequency distribution quantitatively. In detail, according to the spectrum characteristic of bearing fault, the whole time-frequency plane is divided into some segments, and whose entropies are calculated to extract the fault feature of the bearing. By the method of fault feature extraction based on local time-frequency entropy, differences among the segments could be reflected in large. Also the computational complexity is reduced at the same time. The results of simulation and experiment are presented to verify the theory analysis.
		2015 Vol. 36 (1): 77-81 [Abstract] ( 602 ) HTML (1 KB) PDF (2089 KB) ( 739 )

	82	Experimental Research on the Calorimetry Method and Radiation Force Balance Method for Measurement of Ultrasound Power
		HAN Ming-sheng,YANG Ping,ZHU Hai-jiang
		DOI: 10.3969/j.issn.1000-1158.2015.01.18
		Based on the principle of the volume of the castor oil and the buoyance changed when the energy is absorbed by the castor oil, it has designed and achieved the target filled with the castor oil and suspended in the water. And further it has established the system of measurement of the ultrasound power using the balance for the displaying the change of the target, which is solved the traditional calorimetry to accurately measure the temperature field distribution problem. Compared to the plane wave power measured by the radial force balance method, the effectiveness of the measurement system using the calorimetry method for measurement of the acoustic power is validity. And further study of high power and non-plane wave sound field will be carried out.
		2015 Vol. 36 (1): 82-86 [Abstract] ( 567 ) HTML (1 KB) PDF (2210 KB) ( 1013 )

	87	In-situ Efficiency Measurement of Induction Motor Based on MOEAs
		SUN Guan-qun,NIU Zhi-jun,CAI Hui,WANG Bin-rui
		DOI: 10.3969/j.issn.1000-1158.2015.01.19
		A method based on multi-objective evolutionary algorithms (MOEAs ) for real-time and in-situ efficiency determination of induction motor is introduced. The multi-objective algorithm is optimized, and it introduces a low-intrusive level method based on non-dominated sorting genetic algorithm-II( NSGA-II ) and strengths Pareto evolutionary algorithm2( SPEA2) for efficiency estimation of the induction motor. Therefore, the equivalent circuit method, and the segregated losses method combine with MOEAs. Through the practice of a 5.5 kW motor, it shows that, the method on the estimation of induction motor efficiency is effective, and in the normal range of the load, the estimating value and the actual value of test error is less than 3%. And compared to each other, it is found that NSGA-Ⅱresults are slightly superior to that of the SPEA2.
		2015 Vol. 36 (1): 87-91 [Abstract] ( 676 ) HTML (1 KB) PDF (757 KB) ( 686 )

	92	Monte Carlo Analyze of Mismatch Error
		YU Qing-hua,QIU Bin,GAO Sheng-xiang,XIA Wei,DING Feng-hai,WANG Lin-na
		DOI: 10.3969/j.issn.1000-1158.2015.01.20
		A Monte Carlo method is proposed for mismatch error due to the comparatively big uncertainty brought by extreme phase method. As the alternative comparison method to calibrate power sensor for the example, specific realization method of measurement uncertainty resulted by mismatch error from Monte Carlo method was researched, and the results obtained was compared with extreme phase method. The results show that Monte Carlo method is relatively more suitable for evaluating the uncertainty resulted by mismatch error.
		2015 Vol. 36 (1): 92-96 [Abstract] ( 842 ) HTML (1 KB) PDF (1158 KB) ( 481 )

	97	Study on Identification Hammerstein Model of Transducer Based on Improved FLANN
		LIU Tao,HAN Hua-ting,MA Jing,LEI Chao
		DOI: 10.3969/j.issn.1000-1158.2015.01.21
		For identification nonlinear dynamic model of transducer, a method for the nonlinear system one-stage identification by using functional link artificial neural network (FLANN) algorithm is proposed. The nonlinear system is described as a polynomial expression, combining the differential equation of dynamic system to build discrete data expression of input to output, solving the unknown parameters of the model by FLANN training. The convergence speed and the stability of convergence of FLANN algorithm is improved through variable learning factor. Experimental results show that the improved FLANN is simple and effective and has higher convergence rate.
		2015 Vol. 36 (1): 97-101 [Abstract] ( 680 ) HTML (1 KB) PDF (3646 KB) ( 605 )

	102	Uncertainty Evaluation for the Determination of Amaranthus Red in Wine Samples by High Performance Liquid Chromatography
		MA Kang,LI Xiao-Jia,CUI Meng-meng,MA Lian-di
		DOI: 10.3969/j.issn.1000-1158.2015.01.22
		Sources of measurement for amaranthus red in wine samples by high performance liquid chromatography are determined through studying the whole process of analytical results. The uncertainties of analytical result are evaluated by a metrological model of uncertainty. The standard uncertainty for analytical results for amaranthus red in wine samples is mainly consisted of uncertainty of solution reference material of amaranthus red, preparation of work standard solution, calibration curve using the least squares method, preparation for real wine sample, measured repeatability, method recovery and so on. Relative expanded uncertainties for two real wine sample with different content are evaluated and they are 2.6% and 2.2%（k=2）. Evaluation of analytical results of two samples with different content indicated that main resource of uncertainty are measured repeatability and calibration curve.
		2015 Vol. 36 (1): 102-106 [Abstract] ( 691 ) HTML (1 KB) PDF (749 KB) ( 708 )

	107	Measurement Uncertainty Evaluation and Analysis Based on Polynomial Chaos Approach
		YU Xue-feng,YU Jie,WANG Ya-mei,ZHAO Wan-li
		DOI: 10.3969/j.issn.1000-1158.2015.01.23
		Deal with the limitations of measurement uncertainty evaluation method based on ISO GUM, A new approach to the evaluation of measurement uncertainty based on the polynomial chaos theory is presented. The main assumptions behind the measurement uncertainty propagation based on the GUM is analyzed. The measurement uncertainty evaluation used the PCT approach is provided. By the GUM and PCT method, the relative absolute difference between the confidence obtained in the two cases and the true value is computed. It is show that in case of a distribution very different from the Gaussian, the polynomial approach leads to results very close to the ideal case.
		2015 Vol. 36 (1): 107-112 [Abstract] ( 1159 ) HTML (1 KB) PDF (1475 KB) ( 1426 )

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