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ISSN 1000-1158 CN 11-1864/TB
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中文
Effects of Incident Angle Deviation on Film Thickness Measurement Using Extinction Ellipsometry
DU Chenhuo, ZHANG Shu, HU Jiacheng, PI Lei, SHI Yushi
Acta Metrologica Sinica . 2026, (
4
): 475 -481 . DOI: 10.3969/j.issn.1000-1158.2026.04.01
